8/26/2011	12:02:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/26/2011	12:02:23 AM	Recipe started at 12:02 AM
8/26/2011	12:02:23 AM	Helium valve closed
8/26/2011	12:02:23 AM	H2 valve closed
8/26/2011	12:02:23 AM	BCl3 valve closed
8/26/2011	12:02:23 AM	PH3 valve closed
8/26/2011	12:02:23 AM	SiCl4 pre valve closed
8/26/2011	12:02:23 AM	SiCl4 post valve closed
8/26/2011	12:02:23 AM	Main Vac valve closed
8/26/2011	12:02:23 AM	Bubbler valve closed
8/26/2011	12:02:23 AM	Bypass valve opened
8/26/2011	12:02:23 AM	Helium MFC set to  0.000000
8/26/2011	12:02:23 AM	H2 MFC set to  0.000000
8/26/2011	12:02:23 AM	BCl3 MFC set to  0.000000
8/26/2011	12:02:23 AM	PHl3 MFC set to  0.000000
8/26/2011	12:02:23 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:02:23 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:02:23 AM	Tube furnace set to 0
8/26/2011	12:02:24 AM	Helium valve closed
8/26/2011	12:02:24 AM	H2 valve closed
8/26/2011	12:02:24 AM	BCl3 valve closed
8/26/2011	12:02:24 AM	PH3 valve closed
8/26/2011	12:02:24 AM	SiCl4 pre valve closed
8/26/2011	12:02:24 AM	SiCl4 post valve closed
8/26/2011	12:02:24 AM	Main Vac valve closed
8/26/2011	12:02:24 AM	Bubbler valve closed
8/26/2011	12:02:24 AM	Bypass valve opened
8/26/2011	12:02:24 AM	Helium MFC set to  0.000000
8/26/2011	12:02:24 AM	H2 MFC set to  0.000000
8/26/2011	12:02:24 AM	BCl3 MFC set to  0.000000
8/26/2011	12:02:24 AM	PHl3 MFC set to  0.000000
8/26/2011	12:02:24 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:02:24 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:02:24 AM	Tube furnace set to 0
8/26/2011	12:02:25 AM	Helium valve closed
8/26/2011	12:02:25 AM	H2 valve closed
8/26/2011	12:02:25 AM	BCl3 valve closed
8/26/2011	12:02:25 AM	PH3 valve closed
8/26/2011	12:02:25 AM	SiCl4 pre valve closed
8/26/2011	12:02:25 AM	SiCl4 post valve closed
8/26/2011	12:02:25 AM	Bypass valve closed
8/26/2011	12:02:25 AM	Bubbler valve closed
8/26/2011	12:02:25 AM	Main Vac valve opened
8/26/2011	12:02:25 AM	Helium MFC set to  0.000000
8/26/2011	12:02:25 AM	H2 MFC set to  0.000000
8/26/2011	12:02:25 AM	BCl3 MFC set to  0.000000
8/26/2011	12:02:25 AM	PHl3 MFC set to  0.000000
8/26/2011	12:02:25 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:02:25 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:02:25 AM	Tube furnace set to 0
8/26/2011	12:02:55 AM	H2 valve closed
8/26/2011	12:02:55 AM	BCl3 valve closed
8/26/2011	12:02:55 AM	PH3 valve closed
8/26/2011	12:02:55 AM	SiCl4 pre valve closed
8/26/2011	12:02:55 AM	SiCl4 post valve closed
8/26/2011	12:02:55 AM	Bypass valve closed
8/26/2011	12:02:55 AM	Bubbler valve closed
8/26/2011	12:02:55 AM	Helium valve opened
8/26/2011	12:02:55 AM	Main Vac valve opened
8/26/2011	12:02:55 AM	Helium MFC set to  20.000000
8/26/2011	12:02:55 AM	H2 MFC set to  0.000000
8/26/2011	12:02:55 AM	BCl3 MFC set to  0.000000
8/26/2011	12:02:55 AM	PHl3 MFC set to  0.000000
8/26/2011	12:02:55 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:02:55 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:02:55 AM	Tube furnace set to 0
8/26/2011	12:03:25 AM	Helium valve closed
8/26/2011	12:03:25 AM	H2 valve closed
8/26/2011	12:03:25 AM	BCl3 valve closed
8/26/2011	12:03:25 AM	PH3 valve closed
8/26/2011	12:03:25 AM	SiCl4 pre valve closed
8/26/2011	12:03:26 AM	SiCl4 post valve closed
8/26/2011	12:03:26 AM	Bypass valve closed
8/26/2011	12:03:26 AM	Bubbler valve closed
8/26/2011	12:03:26 AM	Main Vac valve opened
8/26/2011	12:03:26 AM	Helium MFC set to  0.000000
8/26/2011	12:03:26 AM	H2 MFC set to  0.000000
8/26/2011	12:03:26 AM	BCl3 MFC set to  0.000000
8/26/2011	12:03:26 AM	PHl3 MFC set to  0.000000
8/26/2011	12:03:26 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:03:26 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:03:26 AM	Tube furnace set to 0
8/26/2011	12:03:56 AM	H2 valve closed
8/26/2011	12:03:56 AM	BCl3 valve closed
8/26/2011	12:03:56 AM	PH3 valve closed
8/26/2011	12:03:56 AM	SiCl4 pre valve closed
8/26/2011	12:03:56 AM	SiCl4 post valve closed
8/26/2011	12:03:56 AM	Bypass valve closed
8/26/2011	12:03:56 AM	Bubbler valve closed
8/26/2011	12:03:56 AM	Helium valve opened
8/26/2011	12:03:56 AM	Main Vac valve opened
8/26/2011	12:03:56 AM	Helium MFC set to  20.000000
8/26/2011	12:03:56 AM	H2 MFC set to  0.000000
8/26/2011	12:03:56 AM	BCl3 MFC set to  0.000000
8/26/2011	12:03:56 AM	PHl3 MFC set to  0.000000
8/26/2011	12:03:56 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:03:56 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:03:56 AM	Tube furnace set to 0
8/26/2011	12:04:26 AM	Helium valve closed
8/26/2011	12:04:26 AM	H2 valve closed
8/26/2011	12:04:26 AM	BCl3 valve closed
8/26/2011	12:04:26 AM	PH3 valve closed
8/26/2011	12:04:26 AM	SiCl4 pre valve closed
8/26/2011	12:04:26 AM	SiCl4 post valve closed
8/26/2011	12:04:26 AM	Bypass valve closed
8/26/2011	12:04:26 AM	Bubbler valve closed
8/26/2011	12:04:26 AM	Main Vac valve opened
8/26/2011	12:04:26 AM	Helium MFC set to  0.000000
8/26/2011	12:04:26 AM	H2 MFC set to  0.000000
8/26/2011	12:04:26 AM	BCl3 MFC set to  0.000000
8/26/2011	12:04:26 AM	PHl3 MFC set to  0.000000
8/26/2011	12:04:26 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:04:26 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:04:26 AM	Tube furnace set to 0
8/26/2011	12:04:56 AM	H2 valve closed
8/26/2011	12:04:56 AM	BCl3 valve closed
8/26/2011	12:04:56 AM	PH3 valve closed
8/26/2011	12:04:56 AM	SiCl4 pre valve closed
8/26/2011	12:04:56 AM	SiCl4 post valve closed
8/26/2011	12:04:56 AM	Bypass valve closed
8/26/2011	12:04:56 AM	Bubbler valve closed
8/26/2011	12:04:56 AM	Helium valve opened
8/26/2011	12:04:56 AM	Main Vac valve opened
8/26/2011	12:04:56 AM	Helium MFC set to  20.000000
8/26/2011	12:04:56 AM	H2 MFC set to  0.000000
8/26/2011	12:04:56 AM	BCl3 MFC set to  0.000000
8/26/2011	12:04:56 AM	PHl3 MFC set to  0.000000
8/26/2011	12:04:56 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:04:56 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:04:56 AM	Tube furnace set to 0
8/26/2011	12:05:26 AM	Helium valve closed
8/26/2011	12:05:26 AM	H2 valve closed
8/26/2011	12:05:26 AM	BCl3 valve closed
8/26/2011	12:05:26 AM	PH3 valve closed
8/26/2011	12:05:26 AM	SiCl4 pre valve closed
8/26/2011	12:05:26 AM	SiCl4 post valve closed
8/26/2011	12:05:26 AM	Bypass valve closed
8/26/2011	12:05:26 AM	Bubbler valve closed
8/26/2011	12:05:26 AM	Main Vac valve opened
8/26/2011	12:05:26 AM	Helium MFC set to  0.000000
8/26/2011	12:05:26 AM	H2 MFC set to  0.000000
8/26/2011	12:05:26 AM	BCl3 MFC set to  0.000000
8/26/2011	12:05:26 AM	PHl3 MFC set to  0.000000
8/26/2011	12:05:26 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:05:26 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:05:26 AM	Tube furnace set to 0
8/26/2011	12:05:56 AM	H2 valve closed
8/26/2011	12:05:56 AM	BCl3 valve closed
8/26/2011	12:05:56 AM	PH3 valve closed
8/26/2011	12:05:56 AM	SiCl4 pre valve closed
8/26/2011	12:05:56 AM	SiCl4 post valve closed
8/26/2011	12:05:56 AM	Bypass valve closed
8/26/2011	12:05:56 AM	Bubbler valve closed
8/26/2011	12:05:56 AM	Helium valve opened
8/26/2011	12:05:56 AM	Main Vac valve opened
8/26/2011	12:05:56 AM	Helium MFC set to  20.000000
8/26/2011	12:05:56 AM	H2 MFC set to  0.000000
8/26/2011	12:05:56 AM	BCl3 MFC set to  0.000000
8/26/2011	12:05:56 AM	PHl3 MFC set to  0.000000
8/26/2011	12:05:56 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:05:57 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:05:57 AM	Tube furnace set to 0
8/26/2011	12:06:27 AM	Helium valve closed
8/26/2011	12:06:27 AM	H2 valve closed
8/26/2011	12:06:27 AM	BCl3 valve closed
8/26/2011	12:06:27 AM	PH3 valve closed
8/26/2011	12:06:27 AM	SiCl4 pre valve closed
8/26/2011	12:06:27 AM	SiCl4 post valve closed
8/26/2011	12:06:27 AM	Bypass valve closed
8/26/2011	12:06:27 AM	Bubbler valve closed
8/26/2011	12:06:27 AM	Main Vac valve opened
8/26/2011	12:06:27 AM	Helium MFC set to  0.000000
8/26/2011	12:06:27 AM	H2 MFC set to  0.000000
8/26/2011	12:06:27 AM	BCl3 MFC set to  0.000000
8/26/2011	12:06:27 AM	PHl3 MFC set to  0.000000
8/26/2011	12:06:27 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:06:27 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:06:27 AM	Tube furnace set to 0
8/26/2011	12:06:57 AM	H2 valve closed
8/26/2011	12:06:57 AM	BCl3 valve closed
8/26/2011	12:06:57 AM	PH3 valve closed
8/26/2011	12:06:57 AM	SiCl4 pre valve closed
8/26/2011	12:06:57 AM	SiCl4 post valve closed
8/26/2011	12:06:57 AM	Bypass valve closed
8/26/2011	12:06:57 AM	Bubbler valve closed
8/26/2011	12:06:57 AM	Helium valve opened
8/26/2011	12:06:57 AM	Main Vac valve opened
8/26/2011	12:06:57 AM	Helium MFC set to  20.000000
8/26/2011	12:06:57 AM	H2 MFC set to  0.000000
8/26/2011	12:06:57 AM	BCl3 MFC set to  0.000000
8/26/2011	12:06:57 AM	PHl3 MFC set to  0.000000
8/26/2011	12:06:57 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:06:57 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:06:57 AM	Tube furnace set to 0
8/26/2011	12:07:27 AM	Helium valve closed
8/26/2011	12:07:27 AM	H2 valve closed
8/26/2011	12:07:27 AM	BCl3 valve closed
8/26/2011	12:07:27 AM	PH3 valve closed
8/26/2011	12:07:27 AM	SiCl4 pre valve closed
8/26/2011	12:07:27 AM	SiCl4 post valve closed
8/26/2011	12:07:27 AM	Bypass valve closed
8/26/2011	12:07:27 AM	Bubbler valve closed
8/26/2011	12:07:27 AM	Main Vac valve opened
8/26/2011	12:07:27 AM	Helium MFC set to  0.000000
8/26/2011	12:07:27 AM	H2 MFC set to  0.000000
8/26/2011	12:07:27 AM	BCl3 MFC set to  0.000000
8/26/2011	12:07:27 AM	PHl3 MFC set to  0.000000
8/26/2011	12:07:27 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:07:27 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:07:27 AM	Tube furnace set to 0
8/26/2011	12:07:57 AM	H2 valve closed
8/26/2011	12:07:57 AM	BCl3 valve closed
8/26/2011	12:07:57 AM	PH3 valve closed
8/26/2011	12:07:57 AM	SiCl4 pre valve closed
8/26/2011	12:07:57 AM	SiCl4 post valve closed
8/26/2011	12:07:57 AM	Bypass valve closed
8/26/2011	12:07:57 AM	Bubbler valve closed
8/26/2011	12:07:57 AM	Helium valve opened
8/26/2011	12:07:57 AM	Main Vac valve opened
8/26/2011	12:07:57 AM	Helium MFC set to  20.000000
8/26/2011	12:07:57 AM	H2 MFC set to  0.000000
8/26/2011	12:07:57 AM	BCl3 MFC set to  0.000000
8/26/2011	12:07:57 AM	PHl3 MFC set to  0.000000
8/26/2011	12:07:57 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:07:57 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:07:57 AM	Tube furnace set to 0
8/26/2011	12:08:27 AM	Helium valve closed
8/26/2011	12:08:27 AM	H2 valve closed
8/26/2011	12:08:27 AM	BCl3 valve closed
8/26/2011	12:08:27 AM	PH3 valve closed
8/26/2011	12:08:27 AM	SiCl4 pre valve closed
8/26/2011	12:08:27 AM	SiCl4 post valve closed
8/26/2011	12:08:27 AM	Bypass valve closed
8/26/2011	12:08:27 AM	Bubbler valve closed
8/26/2011	12:08:27 AM	Main Vac valve opened
8/26/2011	12:08:27 AM	Helium MFC set to  0.000000
8/26/2011	12:08:27 AM	H2 MFC set to  0.000000
8/26/2011	12:08:27 AM	BCl3 MFC set to  0.000000
8/26/2011	12:08:27 AM	PHl3 MFC set to  0.000000
8/26/2011	12:08:27 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:08:27 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:08:28 AM	Tube furnace set to 0
8/26/2011	12:08:58 AM	H2 valve closed
8/26/2011	12:08:58 AM	BCl3 valve closed
8/26/2011	12:08:58 AM	PH3 valve closed
8/26/2011	12:08:58 AM	SiCl4 pre valve closed
8/26/2011	12:08:58 AM	SiCl4 post valve closed
8/26/2011	12:08:58 AM	Bypass valve closed
8/26/2011	12:08:58 AM	Bubbler valve closed
8/26/2011	12:08:58 AM	Helium valve opened
8/26/2011	12:08:58 AM	Main Vac valve opened
8/26/2011	12:08:58 AM	Helium MFC set to  20.000000
8/26/2011	12:08:58 AM	H2 MFC set to  0.000000
8/26/2011	12:08:58 AM	BCl3 MFC set to  0.000000
8/26/2011	12:08:58 AM	PHl3 MFC set to  0.000000
8/26/2011	12:08:58 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:08:58 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:08:58 AM	Tube furnace set to 0
8/26/2011	12:09:28 AM	Helium valve closed
8/26/2011	12:09:28 AM	H2 valve closed
8/26/2011	12:09:28 AM	BCl3 valve closed
8/26/2011	12:09:28 AM	PH3 valve closed
8/26/2011	12:09:28 AM	SiCl4 pre valve closed
8/26/2011	12:09:28 AM	SiCl4 post valve closed
8/26/2011	12:09:28 AM	Bypass valve closed
8/26/2011	12:09:28 AM	Bubbler valve closed
8/26/2011	12:09:28 AM	Main Vac valve opened
8/26/2011	12:09:28 AM	Helium MFC set to  0.000000
8/26/2011	12:09:28 AM	H2 MFC set to  0.000000
8/26/2011	12:09:28 AM	BCl3 MFC set to  0.000000
8/26/2011	12:09:28 AM	PHl3 MFC set to  0.000000
8/26/2011	12:09:28 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:09:28 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:09:28 AM	Tube furnace set to 0
8/26/2011	12:09:58 AM	H2 valve closed
8/26/2011	12:09:58 AM	BCl3 valve closed
8/26/2011	12:09:58 AM	PH3 valve closed
8/26/2011	12:09:58 AM	SiCl4 pre valve closed
8/26/2011	12:09:58 AM	SiCl4 post valve closed
8/26/2011	12:09:58 AM	Bypass valve closed
8/26/2011	12:09:58 AM	Bubbler valve closed
8/26/2011	12:09:58 AM	Helium valve opened
8/26/2011	12:09:58 AM	Main Vac valve opened
8/26/2011	12:09:58 AM	Helium MFC set to  20.000000
8/26/2011	12:09:58 AM	H2 MFC set to  0.000000
8/26/2011	12:09:58 AM	BCl3 MFC set to  0.000000
8/26/2011	12:09:58 AM	PHl3 MFC set to  0.000000
8/26/2011	12:09:58 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:09:58 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:09:58 AM	Tube furnace set to 0
8/26/2011	12:10:28 AM	Helium valve closed
8/26/2011	12:10:28 AM	H2 valve closed
8/26/2011	12:10:28 AM	BCl3 valve closed
8/26/2011	12:10:28 AM	PH3 valve closed
8/26/2011	12:10:28 AM	SiCl4 pre valve closed
8/26/2011	12:10:28 AM	SiCl4 post valve closed
8/26/2011	12:10:28 AM	Bypass valve closed
8/26/2011	12:10:28 AM	Bubbler valve closed
8/26/2011	12:10:28 AM	Main Vac valve opened
8/26/2011	12:10:28 AM	Helium MFC set to  0.000000
8/26/2011	12:10:28 AM	H2 MFC set to  0.000000
8/26/2011	12:10:28 AM	BCl3 MFC set to  0.000000
8/26/2011	12:10:28 AM	PHl3 MFC set to  0.000000
8/26/2011	12:10:28 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:10:28 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:10:29 AM	Tube furnace set to 0
8/26/2011	12:10:59 AM	H2 valve closed
8/26/2011	12:10:59 AM	BCl3 valve closed
8/26/2011	12:10:59 AM	PH3 valve closed
8/26/2011	12:10:59 AM	SiCl4 pre valve closed
8/26/2011	12:10:59 AM	SiCl4 post valve closed
8/26/2011	12:10:59 AM	Bypass valve closed
8/26/2011	12:10:59 AM	Bubbler valve closed
8/26/2011	12:10:59 AM	Helium valve opened
8/26/2011	12:10:59 AM	Main Vac valve opened
8/26/2011	12:10:59 AM	Helium MFC set to  20.000000
8/26/2011	12:10:59 AM	H2 MFC set to  0.000000
8/26/2011	12:10:59 AM	BCl3 MFC set to  0.000000
8/26/2011	12:10:59 AM	PHl3 MFC set to  0.000000
8/26/2011	12:10:59 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:10:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:10:59 AM	Tube furnace set to 0
8/26/2011	12:11:29 AM	Helium valve closed
8/26/2011	12:11:29 AM	H2 valve closed
8/26/2011	12:11:29 AM	BCl3 valve closed
8/26/2011	12:11:29 AM	PH3 valve closed
8/26/2011	12:11:29 AM	SiCl4 pre valve closed
8/26/2011	12:11:29 AM	SiCl4 post valve closed
8/26/2011	12:11:29 AM	Bypass valve closed
8/26/2011	12:11:29 AM	Bubbler valve closed
8/26/2011	12:11:29 AM	Main Vac valve opened
8/26/2011	12:11:29 AM	Helium MFC set to  0.000000
8/26/2011	12:11:29 AM	H2 MFC set to  0.000000
8/26/2011	12:11:29 AM	BCl3 MFC set to  0.000000
8/26/2011	12:11:29 AM	PHl3 MFC set to  0.000000
8/26/2011	12:11:29 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:11:29 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:11:29 AM	Tube furnace set to 0
8/26/2011	12:11:59 AM	H2 valve closed
8/26/2011	12:11:59 AM	BCl3 valve closed
8/26/2011	12:11:59 AM	PH3 valve closed
8/26/2011	12:11:59 AM	SiCl4 pre valve closed
8/26/2011	12:11:59 AM	SiCl4 post valve closed
8/26/2011	12:11:59 AM	Bypass valve closed
8/26/2011	12:11:59 AM	Bubbler valve closed
8/26/2011	12:11:59 AM	Helium valve opened
8/26/2011	12:11:59 AM	Main Vac valve opened
8/26/2011	12:11:59 AM	Helium MFC set to  20.000000
8/26/2011	12:11:59 AM	H2 MFC set to  0.000000
8/26/2011	12:11:59 AM	BCl3 MFC set to  0.000000
8/26/2011	12:11:59 AM	PHl3 MFC set to  0.000000
8/26/2011	12:11:59 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:11:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:11:59 AM	Tube furnace set to 0
8/26/2011	12:12:29 AM	Helium valve closed
8/26/2011	12:12:29 AM	H2 valve closed
8/26/2011	12:12:29 AM	BCl3 valve closed
8/26/2011	12:12:29 AM	PH3 valve closed
8/26/2011	12:12:29 AM	SiCl4 pre valve closed
8/26/2011	12:12:29 AM	SiCl4 post valve closed
8/26/2011	12:12:29 AM	Bypass valve closed
8/26/2011	12:12:29 AM	Bubbler valve closed
8/26/2011	12:12:29 AM	Main Vac valve opened
8/26/2011	12:12:29 AM	Helium MFC set to  0.000000
8/26/2011	12:12:29 AM	H2 MFC set to  0.000000
8/26/2011	12:12:29 AM	BCl3 MFC set to  0.000000
8/26/2011	12:12:29 AM	PHl3 MFC set to  0.000000
8/26/2011	12:12:29 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:12:29 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:12:29 AM	Tube furnace set to 0
8/26/2011	12:12:30 AM	Run finished at 12:12 AM
8/26/2011	12:12:30 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/26/2011	12:44:47 AM	Recipe started at 12:44 AM
8/26/2011	12:44:47 AM	Helium valve closed
8/26/2011	12:44:47 AM	H2 valve closed
8/26/2011	12:44:47 AM	BCl3 valve closed
8/26/2011	12:44:47 AM	PH3 valve closed
8/26/2011	12:44:47 AM	SiCl4 pre valve closed
8/26/2011	12:44:47 AM	SiCl4 post valve closed
8/26/2011	12:44:47 AM	Main Vac valve closed
8/26/2011	12:44:47 AM	Bypass valve closed
8/26/2011	12:44:47 AM	Bubbler valve closed
8/26/2011	12:44:47 AM	Helium MFC set to  0.000000
8/26/2011	12:44:47 AM	H2 MFC set to  0.000000
8/26/2011	12:44:47 AM	BCl3 MFC set to  0.000000
8/26/2011	12:44:47 AM	PHl3 MFC set to  0.000000
8/26/2011	12:44:47 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:44:47 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:44:47 AM	Tube furnace set to 0
8/26/2011	12:44:50 AM	Helium valve closed
8/26/2011	12:44:50 AM	BCl3 valve closed
8/26/2011	12:44:50 AM	PH3 valve closed
8/26/2011	12:44:50 AM	SiCl4 pre valve closed
8/26/2011	12:44:50 AM	SiCl4 post valve closed
8/26/2011	12:44:50 AM	Main Vac valve closed
8/26/2011	12:44:50 AM	Bypass valve closed
8/26/2011	12:44:50 AM	Bubbler valve closed
8/26/2011	12:44:50 AM	H2 valve opened
8/26/2011	12:44:50 AM	Helium MFC set to  0.000000
8/26/2011	12:44:50 AM	H2 MFC set to  500.000000
8/26/2011	12:44:50 AM	BCl3 MFC set to  0.000000
8/26/2011	12:44:50 AM	PHl3 MFC set to  0.000000
8/26/2011	12:44:50 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:44:50 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:44:50 AM	Tube furnace set to 0
8/26/2011	12:45:58 AM	Helium valve closed
8/26/2011	12:45:58 AM	BCl3 valve closed
8/26/2011	12:45:58 AM	PH3 valve closed
8/26/2011	12:45:58 AM	SiCl4 pre valve closed
8/26/2011	12:45:58 AM	SiCl4 post valve closed
8/26/2011	12:45:58 AM	Main Vac valve closed
8/26/2011	12:45:58 AM	Bypass valve closed
8/26/2011	12:45:58 AM	H2 valve opened
8/26/2011	12:45:58 AM	Bubbler valve opened
8/26/2011	12:45:58 AM	Helium MFC set to  0.000000
8/26/2011	12:45:58 AM	H2 MFC set to  500.000000
8/26/2011	12:45:58 AM	BCl3 MFC set to  0.000000
8/26/2011	12:45:58 AM	PHl3 MFC set to  0.000000
8/26/2011	12:45:58 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:45:58 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:45:58 AM	Tube furnace set to 0
8/26/2011	12:45:59 AM	Helium valve closed
8/26/2011	12:45:59 AM	BCl3 valve closed
8/26/2011	12:45:59 AM	PH3 valve closed
8/26/2011	12:45:59 AM	SiCl4 pre valve closed
8/26/2011	12:45:59 AM	SiCl4 post valve closed
8/26/2011	12:45:59 AM	Main Vac valve closed
8/26/2011	12:45:59 AM	Bypass valve closed
8/26/2011	12:45:59 AM	H2 valve opened
8/26/2011	12:45:59 AM	Bubbler valve opened
8/26/2011	12:45:59 AM	Helium MFC set to  0.000000
8/26/2011	12:45:59 AM	H2 MFC set to  500.000000
8/26/2011	12:45:59 AM	BCl3 MFC set to  0.000000
8/26/2011	12:45:59 AM	PHl3 MFC set to  0.000000
8/26/2011	12:45:59 AM	SiCl4 MFC set to  0.000000
8/26/2011	12:45:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:45:59 AM	Tube furnace set to 1000
8/26/2011	1:05:59 AM	Helium valve closed
8/26/2011	1:05:59 AM	BCl3 valve closed
8/26/2011	1:05:59 AM	PH3 valve closed
8/26/2011	1:05:59 AM	Main Vac valve closed
8/26/2011	1:05:59 AM	Bypass valve closed
8/26/2011	1:05:59 AM	H2 valve opened
8/26/2011	1:05:59 AM	SiCl4 pre valve opened
8/26/2011	1:05:59 AM	SiCl4 post valve opened
8/26/2011	1:05:59 AM	Bubbler valve opened
8/26/2011	1:05:59 AM	Helium MFC set to  0.000000
8/26/2011	1:05:59 AM	H2 MFC set to  500.000000
8/26/2011	1:05:59 AM	BCl3 MFC set to  0.000000
8/26/2011	1:05:59 AM	PHl3 MFC set to  0.000000
8/26/2011	1:05:59 AM	SiCl4 MFC set to  50.000000
8/26/2011	1:05:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:06:00 AM	Tube furnace set to 1000
8/26/2011	1:26:00 AM	Helium valve closed
8/26/2011	1:26:00 AM	BCl3 valve closed
8/26/2011	1:26:00 AM	PH3 valve closed
8/26/2011	1:26:00 AM	SiCl4 pre valve closed
8/26/2011	1:26:00 AM	SiCl4 post valve closed
8/26/2011	1:26:00 AM	Main Vac valve closed
8/26/2011	1:26:00 AM	Bypass valve closed
8/26/2011	1:26:00 AM	H2 valve opened
8/26/2011	1:26:00 AM	Bubbler valve opened
8/26/2011	1:26:00 AM	Helium MFC set to  0.000000
8/26/2011	1:26:00 AM	H2 MFC set to  500.000000
8/26/2011	1:26:00 AM	BCl3 MFC set to  0.000000
8/26/2011	1:26:00 AM	PHl3 MFC set to  0.000000
8/26/2011	1:26:00 AM	SiCl4 MFC set to  0.000000
8/26/2011	1:26:00 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:26:00 AM	Tube furnace set to 950
8/26/2011	1:31:00 AM	Helium valve closed
8/26/2011	1:31:00 AM	BCl3 valve closed
8/26/2011	1:31:00 AM	PH3 valve closed
8/26/2011	1:31:00 AM	SiCl4 pre valve closed
8/26/2011	1:31:00 AM	SiCl4 post valve closed
8/26/2011	1:31:00 AM	Main Vac valve closed
8/26/2011	1:31:00 AM	Bypass valve closed
8/26/2011	1:31:00 AM	H2 valve opened
8/26/2011	1:31:00 AM	Bubbler valve opened
8/26/2011	1:31:00 AM	Helium MFC set to  0.000000
8/26/2011	1:31:00 AM	H2 MFC set to  500.000000
8/26/2011	1:31:00 AM	BCl3 MFC set to  0.000000
8/26/2011	1:31:00 AM	PHl3 MFC set to  0.000000
8/26/2011	1:31:00 AM	SiCl4 MFC set to  0.000000
8/26/2011	1:31:00 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:31:00 AM	Tube furnace set to 850
8/26/2011	1:36:00 AM	H2 valve closed
8/26/2011	1:36:00 AM	BCl3 valve closed
8/26/2011	1:36:00 AM	PH3 valve closed
8/26/2011	1:36:00 AM	SiCl4 pre valve closed
8/26/2011	1:36:00 AM	SiCl4 post valve closed
8/26/2011	1:36:00 AM	Main Vac valve closed
8/26/2011	1:36:00 AM	Bypass valve closed
8/26/2011	1:36:00 AM	Helium valve opened
8/26/2011	1:36:00 AM	Bubbler valve opened
8/26/2011	1:36:00 AM	Helium MFC set to  500.000000
8/26/2011	1:36:00 AM	H2 MFC set to  0.000000
8/26/2011	1:36:00 AM	BCl3 MFC set to  0.000000
8/26/2011	1:36:00 AM	PHl3 MFC set to  0.000000
8/26/2011	1:36:00 AM	SiCl4 MFC set to  0.000000
8/26/2011	1:36:00 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:36:00 AM	Tube furnace set to 0
8/26/2011	2:02:46 AM	Helium valve closed
8/26/2011	2:02:46 AM	H2 valve closed
8/26/2011	2:02:46 AM	BCl3 valve closed
8/26/2011	2:02:46 AM	PH3 valve closed
8/26/2011	2:02:46 AM	SiCl4 pre valve closed
8/26/2011	2:02:46 AM	SiCl4 post valve closed
8/26/2011	2:02:46 AM	Main Vac valve closed
8/26/2011	2:02:46 AM	Bypass valve closed
8/26/2011	2:02:46 AM	Bubbler valve closed
8/26/2011	2:02:46 AM	Helium MFC set to  0.000000
8/26/2011	2:02:46 AM	H2 MFC set to  0.000000
8/26/2011	2:02:46 AM	BCl3 MFC set to  0.000000
8/26/2011	2:02:46 AM	PHl3 MFC set to  0.000000
8/26/2011	2:02:46 AM	SiCl4 MFC set to  0.000000
8/26/2011	2:02:46 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:02:46 AM	Tube furnace set to 0
8/26/2011	2:02:47 AM	Run finished at 2:02 AM
8/26/2011	2:05:09 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	2:05:10 AM	Recipe started at 2:05 AM
8/26/2011	2:05:10 AM	Helium valve closed
8/26/2011	2:05:10 AM	H2 valve closed
8/26/2011	2:05:10 AM	BCl3 valve closed
8/26/2011	2:05:10 AM	PH3 valve closed
8/26/2011	2:05:10 AM	SiCl4 pre valve closed
8/26/2011	2:05:10 AM	SiCl4 post valve closed
8/26/2011	2:05:10 AM	Main Vac valve closed
8/26/2011	2:05:10 AM	Bubbler valve closed
8/26/2011	2:05:10 AM	Bypass valve opened
8/26/2011	2:05:10 AM	Helium MFC set to  0.000000
8/26/2011	2:05:10 AM	H2 MFC set to  0.000000
8/26/2011	2:05:10 AM	BCl3 MFC set to  0.000000
8/26/2011	2:05:10 AM	PHl3 MFC set to  0.000000
8/26/2011	2:05:10 AM	SiCl4 MFC set to  0.000000
8/26/2011	2:05:10 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:05:10 AM	Tube furnace set to 0
8/26/2011	2:06:11 AM	Helium valve closed
8/26/2011	2:06:11 AM	H2 valve closed
8/26/2011	2:06:11 AM	BCl3 valve closed
8/26/2011	2:06:11 AM	PH3 valve closed
8/26/2011	2:06:11 AM	SiCl4 pre valve closed
8/26/2011	2:06:11 AM	SiCl4 post valve closed
8/26/2011	2:06:11 AM	Main Vac valve closed
8/26/2011	2:06:11 AM	Bubbler valve closed
8/26/2011	2:06:11 AM	Bypass valve opened
8/26/2011	2:06:11 AM	Helium MFC set to  0.000000
8/26/2011	2:06:11 AM	H2 MFC set to  0.000000
8/26/2011	2:06:11 AM	BCl3 MFC set to  0.000000
8/26/2011	2:06:11 AM	PHl3 MFC set to  0.000000
8/26/2011	2:06:11 AM	SiCl4 MFC set to  0.000000
8/26/2011	2:06:11 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:06:11 AM	Tube furnace set to 0
8/26/2011	2:07:11 AM	Helium valve closed
8/26/2011	2:07:11 AM	H2 valve closed
8/26/2011	2:07:11 AM	BCl3 valve closed
8/26/2011	2:07:11 AM	PH3 valve closed
8/26/2011	2:07:11 AM	SiCl4 pre valve closed
8/26/2011	2:07:11 AM	SiCl4 post valve closed
8/26/2011	2:07:11 AM	Bypass valve closed
8/26/2011	2:07:11 AM	Bubbler valve closed
8/26/2011	2:07:11 AM	Main Vac valve opened
8/26/2011	2:07:11 AM	Helium MFC set to  0.000000
8/26/2011	2:07:11 AM	H2 MFC set to  0.000000
8/26/2011	2:07:11 AM	BCl3 MFC set to  0.000000
8/26/2011	2:07:11 AM	PHl3 MFC set to  0.000000
8/26/2011	2:07:11 AM	SiCl4 MFC set to  0.000000
8/26/2011	2:07:11 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:07:11 AM	Tube furnace set to 0
8/26/2011	2:07:12 AM	Run finished at 2:07 AM
8/26/2011	2:07:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	8:53:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	8:53:55 AM	Recipe started at 8:53 AM
8/26/2011	8:53:55 AM	Helium valve closed
8/26/2011	8:53:55 AM	H2 valve closed
8/26/2011	8:53:55 AM	BCl3 valve closed
8/26/2011	8:53:55 AM	PH3 valve closed
8/26/2011	8:53:55 AM	SiCl4 pre valve closed
8/26/2011	8:53:55 AM	SiCl4 post valve closed
8/26/2011	8:53:55 AM	Main Vac valve closed
8/26/2011	8:53:55 AM	Bypass valve closed
8/26/2011	8:53:55 AM	Bubbler valve closed
8/26/2011	8:53:55 AM	Helium MFC set to  0.000000
8/26/2011	8:53:55 AM	H2 MFC set to  0.000000
8/26/2011	8:53:55 AM	BCl3 MFC set to  0.000000
8/26/2011	8:53:55 AM	PHl3 MFC set to  0.000000
8/26/2011	8:53:55 AM	SiCl4 MFC set to  0.000000
8/26/2011	8:53:55 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:53:56 AM	Tube furnace set to 0
8/26/2011	8:53:59 AM	H2 valve closed
8/26/2011	8:53:59 AM	BCl3 valve closed
8/26/2011	8:53:59 AM	PH3 valve closed
8/26/2011	8:53:59 AM	SiCl4 pre valve closed
8/26/2011	8:53:59 AM	SiCl4 post valve closed
8/26/2011	8:53:59 AM	Main Vac valve closed
8/26/2011	8:53:59 AM	Bypass valve closed
8/26/2011	8:53:59 AM	Bubbler valve closed
8/26/2011	8:53:59 AM	Helium valve opened
8/26/2011	8:53:59 AM	Helium MFC set to  500.000000
8/26/2011	8:53:59 AM	H2 MFC set to  0.000000
8/26/2011	8:53:59 AM	BCl3 MFC set to  0.000000
8/26/2011	8:53:59 AM	PHl3 MFC set to  0.000000
8/26/2011	8:53:59 AM	SiCl4 MFC set to  0.000000
8/26/2011	8:53:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:53:59 AM	Tube furnace set to 0
8/26/2011	8:55:04 AM	Helium valve closed
8/26/2011	8:55:04 AM	H2 valve closed
8/26/2011	8:55:04 AM	BCl3 valve closed
8/26/2011	8:55:04 AM	PH3 valve closed
8/26/2011	8:55:04 AM	SiCl4 pre valve closed
8/26/2011	8:55:04 AM	SiCl4 post valve closed
8/26/2011	8:55:04 AM	Main Vac valve closed
8/26/2011	8:55:04 AM	Bypass valve closed
8/26/2011	8:55:04 AM	Bubbler valve closed
8/26/2011	8:55:04 AM	Helium MFC set to  0.000000
8/26/2011	8:55:04 AM	H2 MFC set to  0.000000
8/26/2011	8:55:04 AM	BCl3 MFC set to  0.000000
8/26/2011	8:55:04 AM	PHl3 MFC set to  0.000000
8/26/2011	8:55:04 AM	SiCl4 MFC set to  0.000000
8/26/2011	8:55:04 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:55:04 AM	Tube furnace set to 0
8/26/2011	8:55:05 AM	Run finished at 8:55 AM
8/26/2011	8:55:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	9:26:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	9:26:25 AM	Recipe started at 9:26 AM
8/26/2011	9:26:25 AM	Helium valve closed
8/26/2011	9:26:25 AM	H2 valve closed
8/26/2011	9:26:25 AM	BCl3 valve closed
8/26/2011	9:26:25 AM	PH3 valve closed
8/26/2011	9:26:25 AM	SiCl4 pre valve closed
8/26/2011	9:26:25 AM	SiCl4 post valve closed
8/26/2011	9:26:25 AM	Main Vac valve closed
8/26/2011	9:26:25 AM	Bubbler valve closed
8/26/2011	9:26:25 AM	Bypass valve opened
8/26/2011	9:26:25 AM	Helium MFC set to  0.000000
8/26/2011	9:26:25 AM	H2 MFC set to  0.000000
8/26/2011	9:26:25 AM	BCl3 MFC set to  0.000000
8/26/2011	9:26:25 AM	PHl3 MFC set to  0.000000
8/26/2011	9:26:25 AM	SiCl4 MFC set to  0.000000
8/26/2011	9:26:25 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:26:26 AM	Tube furnace set to 0
8/26/2011	9:27:42 AM	Helium valve closed
8/26/2011	9:27:42 AM	H2 valve closed
8/26/2011	9:27:42 AM	BCl3 valve closed
8/26/2011	9:27:42 AM	PH3 valve closed
8/26/2011	9:27:42 AM	SiCl4 pre valve closed
8/26/2011	9:27:42 AM	SiCl4 post valve closed
8/26/2011	9:27:42 AM	Main Vac valve closed
8/26/2011	9:27:42 AM	Bubbler valve closed
8/26/2011	9:27:42 AM	Bypass valve opened
8/26/2011	9:27:42 AM	Helium MFC set to  0.000000
8/26/2011	9:27:42 AM	H2 MFC set to  0.000000
8/26/2011	9:27:42 AM	BCl3 MFC set to  0.000000
8/26/2011	9:27:42 AM	PHl3 MFC set to  0.000000
8/26/2011	9:27:42 AM	SiCl4 MFC set to  0.000000
8/26/2011	9:27:42 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:27:42 AM	Tube furnace set to 0
8/26/2011	9:28:43 AM	Helium valve closed
8/26/2011	9:28:43 AM	H2 valve closed
8/26/2011	9:28:43 AM	BCl3 valve closed
8/26/2011	9:28:43 AM	PH3 valve closed
8/26/2011	9:28:43 AM	SiCl4 pre valve closed
8/26/2011	9:28:43 AM	SiCl4 post valve closed
8/26/2011	9:28:43 AM	Bypass valve closed
8/26/2011	9:28:43 AM	Bubbler valve closed
8/26/2011	9:28:43 AM	Main Vac valve opened
8/26/2011	9:28:43 AM	Helium MFC set to  0.000000
8/26/2011	9:28:43 AM	H2 MFC set to  0.000000
8/26/2011	9:28:43 AM	BCl3 MFC set to  0.000000
8/26/2011	9:28:43 AM	PHl3 MFC set to  0.000000
8/26/2011	9:28:43 AM	SiCl4 MFC set to  0.000000
8/26/2011	9:28:43 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:28:43 AM	Tube furnace set to 0
8/26/2011	9:28:44 AM	Run finished at 9:28 AM
8/26/2011	9:28:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:36:39 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:36:39 AM	Recipe started at 10:36 AM
8/26/2011	10:36:39 AM	Helium valve closed
8/26/2011	10:36:39 AM	H2 valve closed
8/26/2011	10:36:39 AM	BCl3 valve closed
8/26/2011	10:36:39 AM	PH3 valve closed
8/26/2011	10:36:39 AM	SiCl4 pre valve closed
8/26/2011	10:36:39 AM	SiCl4 post valve closed
8/26/2011	10:36:39 AM	Main Vac valve closed
8/26/2011	10:36:39 AM	Bypass valve closed
8/26/2011	10:36:39 AM	Bubbler valve closed
8/26/2011	10:36:39 AM	Helium MFC set to  0.000000
8/26/2011	10:36:39 AM	H2 MFC set to  0.000000
8/26/2011	10:36:39 AM	BCl3 MFC set to  0.000000
8/26/2011	10:36:39 AM	PHl3 MFC set to  0.000000
8/26/2011	10:36:39 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:36:39 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:36:39 AM	Tube furnace set to 0
8/26/2011	10:36:39 AM	Run finished at 10:36 AM
8/26/2011	10:36:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:37:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	10:37:01 AM	Recipe started at 10:37 AM
8/26/2011	10:37:01 AM	Helium valve closed
8/26/2011	10:37:01 AM	H2 valve closed
8/26/2011	10:37:01 AM	BCl3 valve closed
8/26/2011	10:37:01 AM	PH3 valve closed
8/26/2011	10:37:01 AM	SiCl4 pre valve closed
8/26/2011	10:37:01 AM	SiCl4 post valve closed
8/26/2011	10:37:01 AM	Main Vac valve closed
8/26/2011	10:37:01 AM	Bypass valve closed
8/26/2011	10:37:01 AM	Bubbler valve closed
8/26/2011	10:37:01 AM	Helium MFC set to  0.000000
8/26/2011	10:37:01 AM	H2 MFC set to  0.000000
8/26/2011	10:37:01 AM	BCl3 MFC set to  0.000000
8/26/2011	10:37:01 AM	PHl3 MFC set to  0.000000
8/26/2011	10:37:01 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:37:01 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:37:01 AM	Tube furnace set to 0
8/26/2011	10:37:04 AM	H2 valve closed
8/26/2011	10:37:04 AM	BCl3 valve closed
8/26/2011	10:37:04 AM	PH3 valve closed
8/26/2011	10:37:04 AM	SiCl4 pre valve closed
8/26/2011	10:37:04 AM	SiCl4 post valve closed
8/26/2011	10:37:04 AM	Main Vac valve closed
8/26/2011	10:37:04 AM	Bypass valve closed
8/26/2011	10:37:04 AM	Bubbler valve closed
8/26/2011	10:37:04 AM	Helium valve opened
8/26/2011	10:37:04 AM	Helium MFC set to  500.000000
8/26/2011	10:37:04 AM	H2 MFC set to  0.000000
8/26/2011	10:37:04 AM	BCl3 MFC set to  0.000000
8/26/2011	10:37:04 AM	PHl3 MFC set to  0.000000
8/26/2011	10:37:04 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:37:04 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:37:04 AM	Tube furnace set to 0
8/26/2011	10:38:09 AM	Helium valve closed
8/26/2011	10:38:09 AM	H2 valve closed
8/26/2011	10:38:09 AM	BCl3 valve closed
8/26/2011	10:38:09 AM	PH3 valve closed
8/26/2011	10:38:09 AM	SiCl4 pre valve closed
8/26/2011	10:38:09 AM	SiCl4 post valve closed
8/26/2011	10:38:09 AM	Main Vac valve closed
8/26/2011	10:38:09 AM	Bypass valve closed
8/26/2011	10:38:09 AM	Bubbler valve closed
8/26/2011	10:38:09 AM	Helium MFC set to  0.000000
8/26/2011	10:38:09 AM	H2 MFC set to  0.000000
8/26/2011	10:38:09 AM	BCl3 MFC set to  0.000000
8/26/2011	10:38:09 AM	PHl3 MFC set to  0.000000
8/26/2011	10:38:09 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:38:09 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:38:10 AM	Tube furnace set to 0
8/26/2011	10:38:11 AM	Run finished at 10:38 AM
8/26/2011	10:38:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	10:41:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:41:04 AM	Recipe started at 10:41 AM
8/26/2011	10:41:04 AM	Helium valve closed
8/26/2011	10:41:04 AM	H2 valve closed
8/26/2011	10:41:04 AM	BCl3 valve closed
8/26/2011	10:41:04 AM	PH3 valve closed
8/26/2011	10:41:04 AM	SiCl4 pre valve closed
8/26/2011	10:41:04 AM	SiCl4 post valve closed
8/26/2011	10:41:04 AM	Main Vac valve closed
8/26/2011	10:41:04 AM	Bubbler valve closed
8/26/2011	10:41:04 AM	Bypass valve opened
8/26/2011	10:41:04 AM	Helium MFC set to  0.000000
8/26/2011	10:41:04 AM	H2 MFC set to  0.000000
8/26/2011	10:41:04 AM	BCl3 MFC set to  0.000000
8/26/2011	10:41:04 AM	PHl3 MFC set to  0.000000
8/26/2011	10:41:04 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:41:04 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:41:04 AM	Tube furnace set to 0
8/26/2011	10:42:11 AM	Helium valve closed
8/26/2011	10:42:11 AM	H2 valve closed
8/26/2011	10:42:11 AM	BCl3 valve closed
8/26/2011	10:42:11 AM	PH3 valve closed
8/26/2011	10:42:11 AM	SiCl4 pre valve closed
8/26/2011	10:42:11 AM	SiCl4 post valve closed
8/26/2011	10:42:11 AM	Main Vac valve closed
8/26/2011	10:42:11 AM	Bubbler valve closed
8/26/2011	10:42:11 AM	Bypass valve opened
8/26/2011	10:42:11 AM	Helium MFC set to  0.000000
8/26/2011	10:42:11 AM	H2 MFC set to  0.000000
8/26/2011	10:42:11 AM	BCl3 MFC set to  0.000000
8/26/2011	10:42:11 AM	PHl3 MFC set to  0.000000
8/26/2011	10:42:11 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:42:11 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:42:11 AM	Tube furnace set to 0
8/26/2011	10:43:11 AM	Helium valve closed
8/26/2011	10:43:11 AM	H2 valve closed
8/26/2011	10:43:11 AM	BCl3 valve closed
8/26/2011	10:43:11 AM	PH3 valve closed
8/26/2011	10:43:11 AM	SiCl4 pre valve closed
8/26/2011	10:43:11 AM	SiCl4 post valve closed
8/26/2011	10:43:11 AM	Bypass valve closed
8/26/2011	10:43:11 AM	Bubbler valve closed
8/26/2011	10:43:11 AM	Main Vac valve opened
8/26/2011	10:43:11 AM	Helium MFC set to  0.000000
8/26/2011	10:43:11 AM	H2 MFC set to  0.000000
8/26/2011	10:43:11 AM	BCl3 MFC set to  0.000000
8/26/2011	10:43:11 AM	PHl3 MFC set to  0.000000
8/26/2011	10:43:11 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:43:11 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:43:11 AM	Tube furnace set to 0
8/26/2011	10:43:12 AM	Run finished at 10:43 AM
8/26/2011	10:43:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:43:34 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:43:34 AM	Recipe started at 10:43 AM
8/26/2011	10:43:34 AM	Helium valve closed
8/26/2011	10:43:34 AM	H2 valve closed
8/26/2011	10:43:34 AM	BCl3 valve closed
8/26/2011	10:43:34 AM	PH3 valve closed
8/26/2011	10:43:34 AM	SiCl4 pre valve closed
8/26/2011	10:43:34 AM	SiCl4 post valve closed
8/26/2011	10:43:34 AM	Main Vac valve closed
8/26/2011	10:43:34 AM	Bypass valve closed
8/26/2011	10:43:34 AM	Bubbler valve closed
8/26/2011	10:43:34 AM	Helium MFC set to  0.000000
8/26/2011	10:43:34 AM	H2 MFC set to  0.000000
8/26/2011	10:43:34 AM	BCl3 MFC set to  0.000000
8/26/2011	10:43:34 AM	PHl3 MFC set to  0.000000
8/26/2011	10:43:34 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:43:34 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:43:34 AM	Tube furnace set to 0
8/26/2011	10:43:35 AM	Run finished at 10:43 AM
8/26/2011	10:43:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:43:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:43:43 AM	Recipe started at 10:43 AM
8/26/2011	10:43:43 AM	Helium valve closed
8/26/2011	10:43:43 AM	H2 valve closed
8/26/2011	10:43:43 AM	BCl3 valve closed
8/26/2011	10:43:43 AM	PH3 valve closed
8/26/2011	10:43:43 AM	SiCl4 pre valve closed
8/26/2011	10:43:43 AM	SiCl4 post valve closed
8/26/2011	10:43:43 AM	Main Vac valve closed
8/26/2011	10:43:43 AM	Bubbler valve closed
8/26/2011	10:43:43 AM	Bypass valve opened
8/26/2011	10:43:43 AM	Helium MFC set to  0.000000
8/26/2011	10:43:43 AM	H2 MFC set to  0.000000
8/26/2011	10:43:43 AM	BCl3 MFC set to  0.000000
8/26/2011	10:43:43 AM	PHl3 MFC set to  0.000000
8/26/2011	10:43:43 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:43:43 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:43:43 AM	Tube furnace set to 0
8/26/2011	10:43:43 AM	Helium valve closed
8/26/2011	10:43:43 AM	H2 valve closed
8/26/2011	10:43:43 AM	BCl3 valve closed
8/26/2011	10:43:43 AM	PH3 valve closed
8/26/2011	10:43:43 AM	SiCl4 pre valve closed
8/26/2011	10:43:43 AM	SiCl4 post valve closed
8/26/2011	10:43:43 AM	Main Vac valve closed
8/26/2011	10:43:43 AM	Bubbler valve closed
8/26/2011	10:43:43 AM	Bypass valve opened
8/26/2011	10:43:43 AM	Helium MFC set to  0.000000
8/26/2011	10:43:43 AM	H2 MFC set to  0.000000
8/26/2011	10:43:43 AM	BCl3 MFC set to  0.000000
8/26/2011	10:43:43 AM	PHl3 MFC set to  0.000000
8/26/2011	10:43:43 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:43:43 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:43:44 AM	Tube furnace set to 0
8/26/2011	10:44:44 AM	Helium valve closed
8/26/2011	10:44:44 AM	H2 valve closed
8/26/2011	10:44:44 AM	BCl3 valve closed
8/26/2011	10:44:44 AM	PH3 valve closed
8/26/2011	10:44:44 AM	SiCl4 pre valve closed
8/26/2011	10:44:44 AM	SiCl4 post valve closed
8/26/2011	10:44:44 AM	Bypass valve closed
8/26/2011	10:44:44 AM	Bubbler valve closed
8/26/2011	10:44:44 AM	Main Vac valve opened
8/26/2011	10:44:44 AM	Helium MFC set to  0.000000
8/26/2011	10:44:44 AM	H2 MFC set to  0.000000
8/26/2011	10:44:44 AM	BCl3 MFC set to  0.000000
8/26/2011	10:44:44 AM	PHl3 MFC set to  0.000000
8/26/2011	10:44:44 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:44:44 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:44:44 AM	Tube furnace set to 0
8/26/2011	10:44:45 AM	Run finished at 10:44 AM
8/26/2011	10:44:45 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:45:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:45:35 AM	Recipe started at 10:45 AM
8/26/2011	10:45:35 AM	Helium valve closed
8/26/2011	10:45:35 AM	H2 valve closed
8/26/2011	10:45:35 AM	BCl3 valve closed
8/26/2011	10:45:35 AM	PH3 valve closed
8/26/2011	10:45:35 AM	SiCl4 pre valve closed
8/26/2011	10:45:35 AM	SiCl4 post valve closed
8/26/2011	10:45:35 AM	Main Vac valve closed
8/26/2011	10:45:35 AM	Bypass valve closed
8/26/2011	10:45:35 AM	Bubbler valve closed
8/26/2011	10:45:35 AM	Helium MFC set to  0.000000
8/26/2011	10:45:35 AM	H2 MFC set to  0.000000
8/26/2011	10:45:35 AM	BCl3 MFC set to  0.000000
8/26/2011	10:45:35 AM	PHl3 MFC set to  0.000000
8/26/2011	10:45:35 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:45:35 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:45:36 AM	Tube furnace set to 0
8/26/2011	10:45:36 AM	Run finished at 10:45 AM
8/26/2011	10:45:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:45:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:45:49 AM	Recipe started at 10:45 AM
8/26/2011	10:45:49 AM	Helium valve closed
8/26/2011	10:45:49 AM	H2 valve closed
8/26/2011	10:45:49 AM	BCl3 valve closed
8/26/2011	10:45:49 AM	PH3 valve closed
8/26/2011	10:45:49 AM	SiCl4 pre valve closed
8/26/2011	10:45:49 AM	SiCl4 post valve closed
8/26/2011	10:45:49 AM	Main Vac valve closed
8/26/2011	10:45:49 AM	Bubbler valve closed
8/26/2011	10:45:49 AM	Bypass valve opened
8/26/2011	10:45:49 AM	Helium MFC set to  0.000000
8/26/2011	10:45:49 AM	H2 MFC set to  0.000000
8/26/2011	10:45:49 AM	BCl3 MFC set to  0.000000
8/26/2011	10:45:49 AM	PHl3 MFC set to  0.000000
8/26/2011	10:45:49 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:45:49 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:45:49 AM	Tube furnace set to 0
8/26/2011	10:45:50 AM	Helium valve closed
8/26/2011	10:45:50 AM	H2 valve closed
8/26/2011	10:45:50 AM	BCl3 valve closed
8/26/2011	10:45:50 AM	PH3 valve closed
8/26/2011	10:45:50 AM	SiCl4 pre valve closed
8/26/2011	10:45:50 AM	SiCl4 post valve closed
8/26/2011	10:45:50 AM	Main Vac valve closed
8/26/2011	10:45:50 AM	Bubbler valve closed
8/26/2011	10:45:50 AM	Bypass valve opened
8/26/2011	10:45:50 AM	Helium MFC set to  0.000000
8/26/2011	10:45:50 AM	H2 MFC set to  0.000000
8/26/2011	10:45:50 AM	BCl3 MFC set to  0.000000
8/26/2011	10:45:50 AM	PHl3 MFC set to  0.000000
8/26/2011	10:45:50 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:45:50 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:45:50 AM	Tube furnace set to 0
8/26/2011	10:46:20 AM	Helium valve closed
8/26/2011	10:46:20 AM	H2 valve closed
8/26/2011	10:46:20 AM	BCl3 valve closed
8/26/2011	10:46:20 AM	PH3 valve closed
8/26/2011	10:46:20 AM	SiCl4 pre valve closed
8/26/2011	10:46:20 AM	SiCl4 post valve closed
8/26/2011	10:46:20 AM	Bypass valve closed
8/26/2011	10:46:20 AM	Bubbler valve closed
8/26/2011	10:46:20 AM	Main Vac valve opened
8/26/2011	10:46:20 AM	Helium MFC set to  0.000000
8/26/2011	10:46:20 AM	H2 MFC set to  0.000000
8/26/2011	10:46:20 AM	BCl3 MFC set to  0.000000
8/26/2011	10:46:20 AM	PHl3 MFC set to  0.000000
8/26/2011	10:46:20 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:46:20 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:46:20 AM	Tube furnace set to 0
8/26/2011	10:46:21 AM	Run finished at 10:46 AM
8/26/2011	10:46:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:47:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:47:22 AM	Recipe started at 10:47 AM
8/26/2011	10:47:22 AM	Helium valve closed
8/26/2011	10:47:22 AM	H2 valve closed
8/26/2011	10:47:22 AM	BCl3 valve closed
8/26/2011	10:47:22 AM	PH3 valve closed
8/26/2011	10:47:22 AM	SiCl4 pre valve closed
8/26/2011	10:47:22 AM	SiCl4 post valve closed
8/26/2011	10:47:22 AM	Main Vac valve closed
8/26/2011	10:47:22 AM	Bypass valve closed
8/26/2011	10:47:22 AM	Bubbler valve closed
8/26/2011	10:47:22 AM	Helium MFC set to  0.000000
8/26/2011	10:47:22 AM	H2 MFC set to  0.000000
8/26/2011	10:47:22 AM	BCl3 MFC set to  0.000000
8/26/2011	10:47:22 AM	PHl3 MFC set to  0.000000
8/26/2011	10:47:22 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:47:22 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:47:22 AM	Tube furnace set to 0
8/26/2011	10:47:22 AM	Run finished at 10:47 AM
8/26/2011	10:47:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:47:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:47:37 AM	Recipe started at 10:47 AM
8/26/2011	10:47:37 AM	Helium valve closed
8/26/2011	10:47:37 AM	H2 valve closed
8/26/2011	10:47:37 AM	BCl3 valve closed
8/26/2011	10:47:37 AM	PH3 valve closed
8/26/2011	10:47:37 AM	SiCl4 pre valve closed
8/26/2011	10:47:37 AM	SiCl4 post valve closed
8/26/2011	10:47:37 AM	Main Vac valve closed
8/26/2011	10:47:37 AM	Bubbler valve closed
8/26/2011	10:47:37 AM	Bypass valve opened
8/26/2011	10:47:37 AM	Helium MFC set to  0.000000
8/26/2011	10:47:37 AM	H2 MFC set to  0.000000
8/26/2011	10:47:37 AM	BCl3 MFC set to  0.000000
8/26/2011	10:47:37 AM	PHl3 MFC set to  0.000000
8/26/2011	10:47:37 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:47:37 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:47:37 AM	Tube furnace set to 0
8/26/2011	10:47:37 AM	Helium valve closed
8/26/2011	10:47:37 AM	H2 valve closed
8/26/2011	10:47:37 AM	BCl3 valve closed
8/26/2011	10:47:37 AM	PH3 valve closed
8/26/2011	10:47:37 AM	SiCl4 pre valve closed
8/26/2011	10:47:37 AM	SiCl4 post valve closed
8/26/2011	10:47:37 AM	Main Vac valve closed
8/26/2011	10:47:37 AM	Bubbler valve closed
8/26/2011	10:47:37 AM	Bypass valve opened
8/26/2011	10:47:37 AM	Helium MFC set to  0.000000
8/26/2011	10:47:37 AM	H2 MFC set to  0.000000
8/26/2011	10:47:37 AM	BCl3 MFC set to  0.000000
8/26/2011	10:47:37 AM	PHl3 MFC set to  0.000000
8/26/2011	10:47:37 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:47:37 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:47:37 AM	Tube furnace set to 0
8/26/2011	10:47:39 AM	Helium valve closed
8/26/2011	10:47:39 AM	H2 valve closed
8/26/2011	10:47:39 AM	BCl3 valve closed
8/26/2011	10:47:39 AM	PH3 valve closed
8/26/2011	10:47:39 AM	SiCl4 pre valve closed
8/26/2011	10:47:39 AM	SiCl4 post valve closed
8/26/2011	10:47:39 AM	Bypass valve closed
8/26/2011	10:47:39 AM	Bubbler valve closed
8/26/2011	10:47:39 AM	Main Vac valve opened
8/26/2011	10:47:39 AM	Helium MFC set to  0.000000
8/26/2011	10:47:39 AM	H2 MFC set to  0.000000
8/26/2011	10:47:39 AM	BCl3 MFC set to  0.000000
8/26/2011	10:47:39 AM	PHl3 MFC set to  0.000000
8/26/2011	10:47:39 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:47:39 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:47:39 AM	Tube furnace set to 0
8/26/2011	10:47:40 AM	Run finished at 10:47 AM
8/26/2011	10:47:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:49:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:49:48 AM	Recipe started at 10:49 AM
8/26/2011	10:49:48 AM	Helium valve closed
8/26/2011	10:49:48 AM	H2 valve closed
8/26/2011	10:49:48 AM	BCl3 valve closed
8/26/2011	10:49:48 AM	PH3 valve closed
8/26/2011	10:49:48 AM	SiCl4 pre valve closed
8/26/2011	10:49:48 AM	SiCl4 post valve closed
8/26/2011	10:49:48 AM	Main Vac valve closed
8/26/2011	10:49:48 AM	Bypass valve closed
8/26/2011	10:49:48 AM	Bubbler valve closed
8/26/2011	10:49:48 AM	Helium MFC set to  0.000000
8/26/2011	10:49:48 AM	H2 MFC set to  0.000000
8/26/2011	10:49:48 AM	BCl3 MFC set to  0.000000
8/26/2011	10:49:48 AM	PHl3 MFC set to  0.000000
8/26/2011	10:49:48 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:49:48 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:49:48 AM	Tube furnace set to 0
8/26/2011	10:49:48 AM	Run finished at 10:49 AM
8/26/2011	10:49:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:49:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:49:59 AM	Recipe started at 10:49 AM
8/26/2011	10:49:59 AM	Helium valve closed
8/26/2011	10:49:59 AM	H2 valve closed
8/26/2011	10:49:59 AM	BCl3 valve closed
8/26/2011	10:49:59 AM	PH3 valve closed
8/26/2011	10:49:59 AM	SiCl4 pre valve closed
8/26/2011	10:49:59 AM	SiCl4 post valve closed
8/26/2011	10:49:59 AM	Main Vac valve closed
8/26/2011	10:49:59 AM	Bubbler valve closed
8/26/2011	10:49:59 AM	Bypass valve opened
8/26/2011	10:49:59 AM	Helium MFC set to  0.000000
8/26/2011	10:49:59 AM	H2 MFC set to  0.000000
8/26/2011	10:49:59 AM	BCl3 MFC set to  0.000000
8/26/2011	10:49:59 AM	PHl3 MFC set to  0.000000
8/26/2011	10:49:59 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:49:59 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:49:59 AM	Tube furnace set to 0
8/26/2011	10:50:00 AM	Helium valve closed
8/26/2011	10:50:00 AM	H2 valve closed
8/26/2011	10:50:00 AM	BCl3 valve closed
8/26/2011	10:50:00 AM	PH3 valve closed
8/26/2011	10:50:00 AM	SiCl4 pre valve closed
8/26/2011	10:50:00 AM	SiCl4 post valve closed
8/26/2011	10:50:00 AM	Main Vac valve closed
8/26/2011	10:50:00 AM	Bubbler valve closed
8/26/2011	10:50:00 AM	Bypass valve opened
8/26/2011	10:50:00 AM	Helium MFC set to  0.000000
8/26/2011	10:50:00 AM	H2 MFC set to  0.000000
8/26/2011	10:50:00 AM	BCl3 MFC set to  0.000000
8/26/2011	10:50:00 AM	PHl3 MFC set to  0.000000
8/26/2011	10:50:00 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:50:00 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:50:00 AM	Tube furnace set to 0
8/26/2011	10:50:00 AM	Helium valve closed
8/26/2011	10:50:00 AM	H2 valve closed
8/26/2011	10:50:00 AM	BCl3 valve closed
8/26/2011	10:50:00 AM	PH3 valve closed
8/26/2011	10:50:00 AM	SiCl4 pre valve closed
8/26/2011	10:50:00 AM	SiCl4 post valve closed
8/26/2011	10:50:00 AM	Bypass valve closed
8/26/2011	10:50:00 AM	Bubbler valve closed
8/26/2011	10:50:00 AM	Main Vac valve opened
8/26/2011	10:50:00 AM	Helium MFC set to  0.000000
8/26/2011	10:50:00 AM	H2 MFC set to  0.000000
8/26/2011	10:50:00 AM	BCl3 MFC set to  0.000000
8/26/2011	10:50:00 AM	PHl3 MFC set to  0.000000
8/26/2011	10:50:00 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:50:00 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:50:00 AM	Tube furnace set to 0
8/26/2011	10:50:01 AM	Run finished at 10:50 AM
8/26/2011	10:50:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:51:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:51:57 AM	Recipe started at 10:51 AM
8/26/2011	10:51:57 AM	Helium valve closed
8/26/2011	10:51:57 AM	H2 valve closed
8/26/2011	10:51:57 AM	BCl3 valve closed
8/26/2011	10:51:57 AM	PH3 valve closed
8/26/2011	10:51:57 AM	SiCl4 pre valve closed
8/26/2011	10:51:57 AM	SiCl4 post valve closed
8/26/2011	10:51:57 AM	Main Vac valve closed
8/26/2011	10:51:57 AM	Bypass valve closed
8/26/2011	10:51:57 AM	Bubbler valve closed
8/26/2011	10:51:57 AM	Helium MFC set to  0.000000
8/26/2011	10:51:57 AM	H2 MFC set to  0.000000
8/26/2011	10:51:57 AM	BCl3 MFC set to  0.000000
8/26/2011	10:51:57 AM	PHl3 MFC set to  0.000000
8/26/2011	10:51:57 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:51:57 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:51:57 AM	Tube furnace set to 0
8/26/2011	10:51:57 AM	Run finished at 10:51 AM
8/26/2011	10:51:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:52:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:52:25 AM	Recipe started at 10:52 AM
8/26/2011	10:52:25 AM	Helium valve closed
8/26/2011	10:52:25 AM	H2 valve closed
8/26/2011	10:52:25 AM	BCl3 valve closed
8/26/2011	10:52:25 AM	PH3 valve closed
8/26/2011	10:52:25 AM	SiCl4 pre valve closed
8/26/2011	10:52:25 AM	SiCl4 post valve closed
8/26/2011	10:52:25 AM	Main Vac valve closed
8/26/2011	10:52:25 AM	Bubbler valve closed
8/26/2011	10:52:25 AM	Bypass valve opened
8/26/2011	10:52:25 AM	Helium MFC set to  0.000000
8/26/2011	10:52:25 AM	H2 MFC set to  0.000000
8/26/2011	10:52:25 AM	BCl3 MFC set to  0.000000
8/26/2011	10:52:25 AM	PHl3 MFC set to  0.000000
8/26/2011	10:52:25 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:52:25 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:52:25 AM	Tube furnace set to 0
8/26/2011	10:52:26 AM	Helium valve closed
8/26/2011	10:52:26 AM	H2 valve closed
8/26/2011	10:52:26 AM	BCl3 valve closed
8/26/2011	10:52:26 AM	PH3 valve closed
8/26/2011	10:52:26 AM	SiCl4 pre valve closed
8/26/2011	10:52:26 AM	SiCl4 post valve closed
8/26/2011	10:52:26 AM	Main Vac valve closed
8/26/2011	10:52:26 AM	Bubbler valve closed
8/26/2011	10:52:26 AM	Bypass valve opened
8/26/2011	10:52:26 AM	Helium MFC set to  0.000000
8/26/2011	10:52:26 AM	H2 MFC set to  0.000000
8/26/2011	10:52:26 AM	BCl3 MFC set to  0.000000
8/26/2011	10:52:26 AM	PHl3 MFC set to  0.000000
8/26/2011	10:52:26 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:52:26 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:52:26 AM	Tube furnace set to 0
8/26/2011	10:52:31 AM	Helium valve closed
8/26/2011	10:52:31 AM	H2 valve closed
8/26/2011	10:52:31 AM	BCl3 valve closed
8/26/2011	10:52:31 AM	PH3 valve closed
8/26/2011	10:52:31 AM	SiCl4 pre valve closed
8/26/2011	10:52:31 AM	SiCl4 post valve closed
8/26/2011	10:52:31 AM	Bypass valve closed
8/26/2011	10:52:31 AM	Bubbler valve closed
8/26/2011	10:52:31 AM	Main Vac valve opened
8/26/2011	10:52:31 AM	Helium MFC set to  0.000000
8/26/2011	10:52:31 AM	H2 MFC set to  0.000000
8/26/2011	10:52:31 AM	BCl3 MFC set to  0.000000
8/26/2011	10:52:31 AM	PHl3 MFC set to  0.000000
8/26/2011	10:52:31 AM	SiCl4 MFC set to  0.000000
8/26/2011	10:52:31 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:52:31 AM	Tube furnace set to 0
8/26/2011	10:52:32 AM	Run finished at 10:52 AM
8/26/2011	10:52:32 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	11:20:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	11:20:21 AM	Recipe started at 11:20 AM
8/26/2011	11:20:21 AM	Helium valve closed
8/26/2011	11:20:21 AM	H2 valve closed
8/26/2011	11:20:21 AM	BCl3 valve closed
8/26/2011	11:20:21 AM	PH3 valve closed
8/26/2011	11:20:21 AM	SiCl4 pre valve closed
8/26/2011	11:20:21 AM	SiCl4 post valve closed
8/26/2011	11:20:21 AM	Main Vac valve closed
8/26/2011	11:20:21 AM	Bypass valve closed
8/26/2011	11:20:21 AM	Bubbler valve closed
8/26/2011	11:20:21 AM	Helium MFC set to  0.000000
8/26/2011	11:20:21 AM	H2 MFC set to  0.000000
8/26/2011	11:20:21 AM	BCl3 MFC set to  0.000000
8/26/2011	11:20:21 AM	PHl3 MFC set to  0.000000
8/26/2011	11:20:21 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:20:21 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:20:21 AM	Tube furnace set to 0
8/26/2011	11:20:22 AM	Run finished at 11:20 AM
8/26/2011	11:20:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	11:20:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	11:20:36 AM	Recipe started at 11:20 AM
8/26/2011	11:20:36 AM	Helium valve closed
8/26/2011	11:20:36 AM	H2 valve closed
8/26/2011	11:20:36 AM	BCl3 valve closed
8/26/2011	11:20:36 AM	PH3 valve closed
8/26/2011	11:20:36 AM	SiCl4 pre valve closed
8/26/2011	11:20:36 AM	SiCl4 post valve closed
8/26/2011	11:20:36 AM	Main Vac valve closed
8/26/2011	11:20:36 AM	Bypass valve closed
8/26/2011	11:20:36 AM	Bubbler valve closed
8/26/2011	11:20:36 AM	Helium MFC set to  0.000000
8/26/2011	11:20:36 AM	H2 MFC set to  0.000000
8/26/2011	11:20:36 AM	BCl3 MFC set to  0.000000
8/26/2011	11:20:36 AM	PHl3 MFC set to  0.000000
8/26/2011	11:20:36 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:20:36 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:20:36 AM	Tube furnace set to 0
8/26/2011	11:20:39 AM	H2 valve closed
8/26/2011	11:20:39 AM	BCl3 valve closed
8/26/2011	11:20:39 AM	PH3 valve closed
8/26/2011	11:20:39 AM	SiCl4 pre valve closed
8/26/2011	11:20:39 AM	SiCl4 post valve closed
8/26/2011	11:20:39 AM	Main Vac valve closed
8/26/2011	11:20:39 AM	Bypass valve closed
8/26/2011	11:20:39 AM	Bubbler valve closed
8/26/2011	11:20:39 AM	Helium valve opened
8/26/2011	11:20:39 AM	Helium MFC set to  500.000000
8/26/2011	11:20:39 AM	H2 MFC set to  0.000000
8/26/2011	11:20:39 AM	BCl3 MFC set to  0.000000
8/26/2011	11:20:39 AM	PHl3 MFC set to  0.000000
8/26/2011	11:20:39 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:20:39 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:20:39 AM	Tube furnace set to 0
8/26/2011	11:20:42 AM	Run aborted at 11:20 AM
8/26/2011	11:20:42 AM	Helium valve closed
8/26/2011	11:20:42 AM	H2 valve closed
8/26/2011	11:20:42 AM	BCl3 valve closed
8/26/2011	11:20:42 AM	PH3 valve closed
8/26/2011	11:20:42 AM	SiCl4 pre valve closed
8/26/2011	11:20:42 AM	SiCl4 post valve closed
8/26/2011	11:20:42 AM	Bypass valve closed
8/26/2011	11:20:42 AM	Main Vac valve closed
8/26/2011	11:20:42 AM	Bubbler valve closed
8/26/2011	11:20:42 AM	Helium MFC set to  0.000000
8/26/2011	11:20:42 AM	H2 MFC set to  0.000000
8/26/2011	11:20:42 AM	BCl3 MFC set to  0.000000
8/26/2011	11:20:42 AM	PHl3 MFC set to  0.000000
8/26/2011	11:20:42 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:20:43 AM	Tube furnace set to 0
8/26/2011	11:20:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	11:20:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	11:20:45 AM	Recipe started at 11:20 AM
8/26/2011	11:20:45 AM	Helium valve closed
8/26/2011	11:20:45 AM	H2 valve closed
8/26/2011	11:20:45 AM	BCl3 valve closed
8/26/2011	11:20:45 AM	PH3 valve closed
8/26/2011	11:20:45 AM	SiCl4 pre valve closed
8/26/2011	11:20:45 AM	SiCl4 post valve closed
8/26/2011	11:20:45 AM	Main Vac valve closed
8/26/2011	11:20:45 AM	Bubbler valve closed
8/26/2011	11:20:45 AM	Bypass valve opened
8/26/2011	11:20:45 AM	Helium MFC set to  0.000000
8/26/2011	11:20:45 AM	H2 MFC set to  0.000000
8/26/2011	11:20:45 AM	BCl3 MFC set to  0.000000
8/26/2011	11:20:45 AM	PHl3 MFC set to  0.000000
8/26/2011	11:20:45 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:20:45 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:20:45 AM	Tube furnace set to 0
8/26/2011	11:21:21 AM	Helium valve closed
8/26/2011	11:21:21 AM	H2 valve closed
8/26/2011	11:21:21 AM	BCl3 valve closed
8/26/2011	11:21:22 AM	PH3 valve closed
8/26/2011	11:21:22 AM	SiCl4 pre valve closed
8/26/2011	11:21:22 AM	SiCl4 post valve closed
8/26/2011	11:21:22 AM	Main Vac valve closed
8/26/2011	11:21:22 AM	Bubbler valve closed
8/26/2011	11:21:22 AM	Bypass valve opened
8/26/2011	11:21:22 AM	Helium MFC set to  0.000000
8/26/2011	11:21:22 AM	H2 MFC set to  0.000000
8/26/2011	11:21:22 AM	BCl3 MFC set to  0.000000
8/26/2011	11:21:22 AM	PHl3 MFC set to  0.000000
8/26/2011	11:21:22 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:21:22 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:21:22 AM	Tube furnace set to 0
8/26/2011	11:21:23 AM	Helium valve closed
8/26/2011	11:21:23 AM	H2 valve closed
8/26/2011	11:21:23 AM	BCl3 valve closed
8/26/2011	11:21:23 AM	PH3 valve closed
8/26/2011	11:21:23 AM	SiCl4 pre valve closed
8/26/2011	11:21:23 AM	SiCl4 post valve closed
8/26/2011	11:21:23 AM	Bypass valve closed
8/26/2011	11:21:23 AM	Bubbler valve closed
8/26/2011	11:21:23 AM	Main Vac valve opened
8/26/2011	11:21:23 AM	Helium MFC set to  0.000000
8/26/2011	11:21:23 AM	H2 MFC set to  0.000000
8/26/2011	11:21:23 AM	BCl3 MFC set to  0.000000
8/26/2011	11:21:23 AM	PHl3 MFC set to  0.000000
8/26/2011	11:21:23 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:21:23 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:21:24 AM	Tube furnace set to 0
8/26/2011	11:21:25 AM	Run finished at 11:21 AM
8/26/2011	11:21:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	11:22:05 AM	Recipe started at 11:22 AM
8/26/2011	11:22:05 AM	Helium valve closed
8/26/2011	11:22:05 AM	H2 valve closed
8/26/2011	11:22:05 AM	BCl3 valve closed
8/26/2011	11:22:05 AM	PH3 valve closed
8/26/2011	11:22:05 AM	SiCl4 pre valve closed
8/26/2011	11:22:05 AM	SiCl4 post valve closed
8/26/2011	11:22:05 AM	Main Vac valve closed
8/26/2011	11:22:05 AM	Bypass valve closed
8/26/2011	11:22:05 AM	Bubbler valve closed
8/26/2011	11:22:05 AM	Helium MFC set to  0.000000
8/26/2011	11:22:05 AM	H2 MFC set to  0.000000
8/26/2011	11:22:05 AM	BCl3 MFC set to  0.000000
8/26/2011	11:22:05 AM	PHl3 MFC set to  0.000000
8/26/2011	11:22:05 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:22:05 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:22:06 AM	Tube furnace set to 0
8/26/2011	11:22:09 AM	Helium valve closed
8/26/2011	11:22:09 AM	BCl3 valve closed
8/26/2011	11:22:09 AM	PH3 valve closed
8/26/2011	11:22:09 AM	SiCl4 pre valve closed
8/26/2011	11:22:09 AM	SiCl4 post valve closed
8/26/2011	11:22:09 AM	Main Vac valve closed
8/26/2011	11:22:09 AM	Bypass valve closed
8/26/2011	11:22:09 AM	Bubbler valve closed
8/26/2011	11:22:09 AM	H2 valve opened
8/26/2011	11:22:09 AM	Helium MFC set to  0.000000
8/26/2011	11:22:09 AM	H2 MFC set to  500.000000
8/26/2011	11:22:09 AM	BCl3 MFC set to  0.000000
8/26/2011	11:22:09 AM	PHl3 MFC set to  0.000000
8/26/2011	11:22:09 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:22:09 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:22:09 AM	Tube furnace set to 0
8/26/2011	11:23:16 AM	Helium valve closed
8/26/2011	11:23:16 AM	BCl3 valve closed
8/26/2011	11:23:16 AM	PH3 valve closed
8/26/2011	11:23:16 AM	SiCl4 pre valve closed
8/26/2011	11:23:16 AM	SiCl4 post valve closed
8/26/2011	11:23:16 AM	Main Vac valve closed
8/26/2011	11:23:16 AM	Bypass valve closed
8/26/2011	11:23:16 AM	H2 valve opened
8/26/2011	11:23:16 AM	Bubbler valve opened
8/26/2011	11:23:16 AM	Helium MFC set to  0.000000
8/26/2011	11:23:16 AM	H2 MFC set to  500.000000
8/26/2011	11:23:16 AM	BCl3 MFC set to  0.000000
8/26/2011	11:23:16 AM	PHl3 MFC set to  0.000000
8/26/2011	11:23:16 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:23:16 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:23:16 AM	Tube furnace set to 0
8/26/2011	11:23:17 AM	Helium valve closed
8/26/2011	11:23:17 AM	BCl3 valve closed
8/26/2011	11:23:17 AM	PH3 valve closed
8/26/2011	11:23:17 AM	SiCl4 pre valve closed
8/26/2011	11:23:17 AM	SiCl4 post valve closed
8/26/2011	11:23:17 AM	Main Vac valve closed
8/26/2011	11:23:17 AM	Bypass valve closed
8/26/2011	11:23:17 AM	H2 valve opened
8/26/2011	11:23:17 AM	Bubbler valve opened
8/26/2011	11:23:17 AM	Helium MFC set to  0.000000
8/26/2011	11:23:17 AM	H2 MFC set to  500.000000
8/26/2011	11:23:17 AM	BCl3 MFC set to  0.000000
8/26/2011	11:23:17 AM	PHl3 MFC set to  0.000000
8/26/2011	11:23:17 AM	SiCl4 MFC set to  0.000000
8/26/2011	11:23:17 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:23:17 AM	Tube furnace set to 1000
8/26/2011	11:43:17 AM	Helium valve closed
8/26/2011	11:43:17 AM	PH3 valve closed
8/26/2011	11:43:17 AM	Main Vac valve closed
8/26/2011	11:43:17 AM	Bypass valve closed
8/26/2011	11:43:17 AM	H2 valve opened
8/26/2011	11:43:17 AM	BCl3 valve opened
8/26/2011	11:43:17 AM	SiCl4 pre valve opened
8/26/2011	11:43:17 AM	SiCl4 post valve opened
8/26/2011	11:43:17 AM	Bubbler valve opened
8/26/2011	11:43:17 AM	Helium MFC set to  0.000000
8/26/2011	11:43:17 AM	H2 MFC set to  500.000000
8/26/2011	11:43:17 AM	BCl3 MFC set to  2.000000
8/26/2011	11:43:17 AM	PHl3 MFC set to  0.000000
8/26/2011	11:43:17 AM	SiCl4 MFC set to  50.000000
8/26/2011	11:43:17 AM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:43:17 AM	Tube furnace set to 1000
8/26/2011	12:03:17 PM	Helium valve closed
8/26/2011	12:03:17 PM	BCl3 valve closed
8/26/2011	12:03:17 PM	PH3 valve closed
8/26/2011	12:03:17 PM	SiCl4 pre valve closed
8/26/2011	12:03:17 PM	SiCl4 post valve closed
8/26/2011	12:03:17 PM	Main Vac valve closed
8/26/2011	12:03:17 PM	Bypass valve closed
8/26/2011	12:03:17 PM	H2 valve opened
8/26/2011	12:03:17 PM	Bubbler valve opened
8/26/2011	12:03:17 PM	Helium MFC set to  0.000000
8/26/2011	12:03:17 PM	H2 MFC set to  500.000000
8/26/2011	12:03:17 PM	BCl3 MFC set to  0.000000
8/26/2011	12:03:17 PM	PHl3 MFC set to  0.000000
8/26/2011	12:03:17 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:03:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:03:18 PM	Tube furnace set to 950
8/26/2011	12:08:18 PM	Helium valve closed
8/26/2011	12:08:18 PM	BCl3 valve closed
8/26/2011	12:08:18 PM	PH3 valve closed
8/26/2011	12:08:18 PM	SiCl4 pre valve closed
8/26/2011	12:08:18 PM	SiCl4 post valve closed
8/26/2011	12:08:18 PM	Main Vac valve closed
8/26/2011	12:08:18 PM	Bypass valve closed
8/26/2011	12:08:18 PM	H2 valve opened
8/26/2011	12:08:18 PM	Bubbler valve opened
8/26/2011	12:08:18 PM	Helium MFC set to  0.000000
8/26/2011	12:08:18 PM	H2 MFC set to  500.000000
8/26/2011	12:08:18 PM	BCl3 MFC set to  0.000000
8/26/2011	12:08:18 PM	PHl3 MFC set to  0.000000
8/26/2011	12:08:18 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:08:18 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:08:18 PM	Tube furnace set to 850
8/26/2011	12:13:18 PM	H2 valve closed
8/26/2011	12:13:18 PM	BCl3 valve closed
8/26/2011	12:13:18 PM	PH3 valve closed
8/26/2011	12:13:18 PM	SiCl4 pre valve closed
8/26/2011	12:13:18 PM	SiCl4 post valve closed
8/26/2011	12:13:18 PM	Main Vac valve closed
8/26/2011	12:13:18 PM	Bypass valve closed
8/26/2011	12:13:18 PM	Helium valve opened
8/26/2011	12:13:18 PM	Bubbler valve opened
8/26/2011	12:13:18 PM	Helium MFC set to  500.000000
8/26/2011	12:13:18 PM	H2 MFC set to  0.000000
8/26/2011	12:13:18 PM	BCl3 MFC set to  0.000000
8/26/2011	12:13:18 PM	PHl3 MFC set to  0.000000
8/26/2011	12:13:18 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:13:18 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:13:18 PM	Tube furnace set to 0
8/26/2011	12:35:09 PM	Helium valve closed
8/26/2011	12:35:09 PM	H2 valve closed
8/26/2011	12:35:09 PM	BCl3 valve closed
8/26/2011	12:35:09 PM	PH3 valve closed
8/26/2011	12:35:09 PM	SiCl4 pre valve closed
8/26/2011	12:35:09 PM	SiCl4 post valve closed
8/26/2011	12:35:09 PM	Main Vac valve closed
8/26/2011	12:35:09 PM	Bypass valve closed
8/26/2011	12:35:09 PM	Bubbler valve closed
8/26/2011	12:35:09 PM	Helium MFC set to  0.000000
8/26/2011	12:35:09 PM	H2 MFC set to  0.000000
8/26/2011	12:35:09 PM	BCl3 MFC set to  0.000000
8/26/2011	12:35:09 PM	PHl3 MFC set to  0.000000
8/26/2011	12:35:09 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:35:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:35:09 PM	Tube furnace set to 0
8/26/2011	12:35:10 PM	Run finished at 12:35 PM
8/26/2011	12:41:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	12:41:25 PM	Recipe started at 12:41 PM
8/26/2011	12:41:25 PM	Helium valve closed
8/26/2011	12:41:25 PM	H2 valve closed
8/26/2011	12:41:25 PM	BCl3 valve closed
8/26/2011	12:41:25 PM	PH3 valve closed
8/26/2011	12:41:25 PM	SiCl4 pre valve closed
8/26/2011	12:41:25 PM	SiCl4 post valve closed
8/26/2011	12:41:25 PM	Main Vac valve closed
8/26/2011	12:41:25 PM	Bubbler valve closed
8/26/2011	12:41:25 PM	Bypass valve opened
8/26/2011	12:41:25 PM	Helium MFC set to  0.000000
8/26/2011	12:41:25 PM	H2 MFC set to  0.000000
8/26/2011	12:41:25 PM	BCl3 MFC set to  0.000000
8/26/2011	12:41:25 PM	PHl3 MFC set to  0.000000
8/26/2011	12:41:25 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:41:25 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:41:26 PM	Tube furnace set to 0
8/26/2011	12:42:33 PM	Helium valve closed
8/26/2011	12:42:33 PM	H2 valve closed
8/26/2011	12:42:33 PM	BCl3 valve closed
8/26/2011	12:42:33 PM	PH3 valve closed
8/26/2011	12:42:33 PM	SiCl4 pre valve closed
8/26/2011	12:42:33 PM	SiCl4 post valve closed
8/26/2011	12:42:33 PM	Main Vac valve closed
8/26/2011	12:42:33 PM	Bubbler valve closed
8/26/2011	12:42:33 PM	Bypass valve opened
8/26/2011	12:42:33 PM	Helium MFC set to  0.000000
8/26/2011	12:42:33 PM	H2 MFC set to  0.000000
8/26/2011	12:42:33 PM	BCl3 MFC set to  0.000000
8/26/2011	12:42:33 PM	PHl3 MFC set to  0.000000
8/26/2011	12:42:33 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:42:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:42:34 PM	Tube furnace set to 0
8/26/2011	12:43:34 PM	Helium valve closed
8/26/2011	12:43:34 PM	H2 valve closed
8/26/2011	12:43:34 PM	BCl3 valve closed
8/26/2011	12:43:34 PM	PH3 valve closed
8/26/2011	12:43:34 PM	SiCl4 pre valve closed
8/26/2011	12:43:34 PM	SiCl4 post valve closed
8/26/2011	12:43:34 PM	Bypass valve closed
8/26/2011	12:43:34 PM	Bubbler valve closed
8/26/2011	12:43:34 PM	Main Vac valve opened
8/26/2011	12:43:34 PM	Helium MFC set to  0.000000
8/26/2011	12:43:34 PM	H2 MFC set to  0.000000
8/26/2011	12:43:34 PM	BCl3 MFC set to  0.000000
8/26/2011	12:43:34 PM	PHl3 MFC set to  0.000000
8/26/2011	12:43:34 PM	SiCl4 MFC set to  0.000000
8/26/2011	12:43:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	12:43:34 PM	Tube furnace set to 0
8/26/2011	12:43:35 PM	Run finished at 12:43 PM
8/26/2011	12:43:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	1:24:54 PM	Recipe started at 1:24 PM
8/26/2011	1:24:54 PM	Helium valve closed
8/26/2011	1:24:54 PM	H2 valve closed
8/26/2011	1:24:54 PM	BCl3 valve closed
8/26/2011	1:24:54 PM	PH3 valve closed
8/26/2011	1:24:54 PM	SiCl4 pre valve closed
8/26/2011	1:24:54 PM	SiCl4 post valve closed
8/26/2011	1:24:54 PM	Main Vac valve closed
8/26/2011	1:24:54 PM	Bypass valve closed
8/26/2011	1:24:54 PM	Bubbler valve closed
8/26/2011	1:24:54 PM	Helium MFC set to  0.000000
8/26/2011	1:24:54 PM	H2 MFC set to  0.000000
8/26/2011	1:24:54 PM	BCl3 MFC set to  0.000000
8/26/2011	1:24:54 PM	PHl3 MFC set to  0.000000
8/26/2011	1:24:54 PM	SiCl4 MFC set to  0.000000
8/26/2011	1:24:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:24:54 PM	Tube furnace set to 0
8/26/2011	1:24:57 PM	Helium valve closed
8/26/2011	1:24:57 PM	BCl3 valve closed
8/26/2011	1:24:57 PM	PH3 valve closed
8/26/2011	1:24:57 PM	SiCl4 pre valve closed
8/26/2011	1:24:57 PM	SiCl4 post valve closed
8/26/2011	1:24:57 PM	Main Vac valve closed
8/26/2011	1:24:57 PM	Bypass valve closed
8/26/2011	1:24:57 PM	Bubbler valve closed
8/26/2011	1:24:57 PM	H2 valve opened
8/26/2011	1:24:57 PM	Helium MFC set to  0.000000
8/26/2011	1:24:57 PM	H2 MFC set to  500.000000
8/26/2011	1:24:57 PM	BCl3 MFC set to  0.000000
8/26/2011	1:24:57 PM	PHl3 MFC set to  0.000000
8/26/2011	1:24:57 PM	SiCl4 MFC set to  0.000000
8/26/2011	1:24:57 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:24:57 PM	Tube furnace set to 0
8/26/2011	1:26:00 PM	Helium valve closed
8/26/2011	1:26:00 PM	BCl3 valve closed
8/26/2011	1:26:00 PM	PH3 valve closed
8/26/2011	1:26:00 PM	SiCl4 pre valve closed
8/26/2011	1:26:00 PM	SiCl4 post valve closed
8/26/2011	1:26:00 PM	Main Vac valve closed
8/26/2011	1:26:00 PM	Bypass valve closed
8/26/2011	1:26:00 PM	H2 valve opened
8/26/2011	1:26:00 PM	Bubbler valve opened
8/26/2011	1:26:00 PM	Helium MFC set to  0.000000
8/26/2011	1:26:00 PM	H2 MFC set to  500.000000
8/26/2011	1:26:00 PM	BCl3 MFC set to  0.000000
8/26/2011	1:26:00 PM	PHl3 MFC set to  0.000000
8/26/2011	1:26:00 PM	SiCl4 MFC set to  0.000000
8/26/2011	1:26:00 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:26:00 PM	Tube furnace set to 0
8/26/2011	1:26:01 PM	Helium valve closed
8/26/2011	1:26:01 PM	BCl3 valve closed
8/26/2011	1:26:01 PM	PH3 valve closed
8/26/2011	1:26:01 PM	SiCl4 pre valve closed
8/26/2011	1:26:01 PM	SiCl4 post valve closed
8/26/2011	1:26:01 PM	Main Vac valve closed
8/26/2011	1:26:01 PM	Bypass valve closed
8/26/2011	1:26:01 PM	H2 valve opened
8/26/2011	1:26:01 PM	Bubbler valve opened
8/26/2011	1:26:01 PM	Helium MFC set to  0.000000
8/26/2011	1:26:01 PM	H2 MFC set to  500.000000
8/26/2011	1:26:01 PM	BCl3 MFC set to  0.000000
8/26/2011	1:26:01 PM	PHl3 MFC set to  0.000000
8/26/2011	1:26:01 PM	SiCl4 MFC set to  0.000000
8/26/2011	1:26:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:26:01 PM	Tube furnace set to 1000
8/26/2011	1:46:01 PM	Helium valve closed
8/26/2011	1:46:01 PM	PH3 valve closed
8/26/2011	1:46:01 PM	SiCl4 post valve closed
8/26/2011	1:46:01 PM	Main Vac valve closed
8/26/2011	1:46:01 PM	Bypass valve closed
8/26/2011	1:46:01 PM	H2 valve opened
8/26/2011	1:46:01 PM	BCl3 valve opened
8/26/2011	1:46:01 PM	SiCl4 pre valve opened
8/26/2011	1:46:01 PM	Bubbler valve opened
8/26/2011	1:46:01 PM	Helium MFC set to  0.000000
8/26/2011	1:46:01 PM	H2 MFC set to  500.000000
8/26/2011	1:46:01 PM	BCl3 MFC set to  2.000000
8/26/2011	1:46:01 PM	PHl3 MFC set to  0.000000
8/26/2011	1:46:01 PM	SiCl4 MFC set to  50.000000
8/26/2011	1:46:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:46:02 PM	Tube furnace set to 1000
8/26/2011	1:46:04 PM	Helium valve closed
8/26/2011	1:46:04 PM	PH3 valve closed
8/26/2011	1:46:04 PM	Main Vac valve closed
8/26/2011	1:46:04 PM	Bypass valve closed
8/26/2011	1:46:04 PM	H2 valve opened
8/26/2011	1:46:04 PM	BCl3 valve opened
8/26/2011	1:46:04 PM	SiCl4 pre valve opened
8/26/2011	1:46:04 PM	SiCl4 post valve opened
8/26/2011	1:46:04 PM	Bubbler valve opened
8/26/2011	1:46:04 PM	Helium MFC set to  0.000000
8/26/2011	1:46:04 PM	H2 MFC set to  500.000000
8/26/2011	1:46:04 PM	BCl3 MFC set to  2.000000
8/26/2011	1:46:04 PM	PHl3 MFC set to  0.000000
8/26/2011	1:46:04 PM	SiCl4 MFC set to  50.000000
8/26/2011	1:46:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:46:04 PM	Tube furnace set to 1000
8/26/2011	1:56:04 PM	Helium valve closed
8/26/2011	1:56:04 PM	BCl3 valve closed
8/26/2011	1:56:04 PM	PH3 valve closed
8/26/2011	1:56:04 PM	SiCl4 pre valve closed
8/26/2011	1:56:04 PM	SiCl4 post valve closed
8/26/2011	1:56:04 PM	Main Vac valve closed
8/26/2011	1:56:04 PM	Bypass valve closed
8/26/2011	1:56:04 PM	H2 valve opened
8/26/2011	1:56:04 PM	Bubbler valve opened
8/26/2011	1:56:04 PM	Helium MFC set to  0.000000
8/26/2011	1:56:04 PM	H2 MFC set to  500.000000
8/26/2011	1:56:04 PM	BCl3 MFC set to  0.000000
8/26/2011	1:56:04 PM	PHl3 MFC set to  0.000000
8/26/2011	1:56:04 PM	SiCl4 MFC set to  0.000000
8/26/2011	1:56:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	1:56:04 PM	Tube furnace set to 950
8/26/2011	2:01:04 PM	Helium valve closed
8/26/2011	2:01:04 PM	BCl3 valve closed
8/26/2011	2:01:04 PM	PH3 valve closed
8/26/2011	2:01:04 PM	SiCl4 pre valve closed
8/26/2011	2:01:04 PM	SiCl4 post valve closed
8/26/2011	2:01:04 PM	Main Vac valve closed
8/26/2011	2:01:04 PM	Bypass valve closed
8/26/2011	2:01:04 PM	H2 valve opened
8/26/2011	2:01:04 PM	Bubbler valve opened
8/26/2011	2:01:04 PM	Helium MFC set to  0.000000
8/26/2011	2:01:04 PM	H2 MFC set to  500.000000
8/26/2011	2:01:04 PM	BCl3 MFC set to  0.000000
8/26/2011	2:01:04 PM	PHl3 MFC set to  0.000000
8/26/2011	2:01:04 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:01:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:01:04 PM	Tube furnace set to 850
8/26/2011	2:06:04 PM	H2 valve closed
8/26/2011	2:06:04 PM	BCl3 valve closed
8/26/2011	2:06:04 PM	PH3 valve closed
8/26/2011	2:06:04 PM	SiCl4 pre valve closed
8/26/2011	2:06:04 PM	SiCl4 post valve closed
8/26/2011	2:06:04 PM	Main Vac valve closed
8/26/2011	2:06:04 PM	Bypass valve closed
8/26/2011	2:06:04 PM	Helium valve opened
8/26/2011	2:06:04 PM	Bubbler valve opened
8/26/2011	2:06:04 PM	Helium MFC set to  500.000000
8/26/2011	2:06:04 PM	H2 MFC set to  0.000000
8/26/2011	2:06:04 PM	BCl3 MFC set to  0.000000
8/26/2011	2:06:04 PM	PHl3 MFC set to  0.000000
8/26/2011	2:06:04 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:06:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:06:04 PM	Tube furnace set to 0
8/26/2011	2:46:04 PM	Helium valve closed
8/26/2011	2:46:04 PM	H2 valve closed
8/26/2011	2:46:04 PM	BCl3 valve closed
8/26/2011	2:46:04 PM	PH3 valve closed
8/26/2011	2:46:04 PM	SiCl4 pre valve closed
8/26/2011	2:46:04 PM	SiCl4 post valve closed
8/26/2011	2:46:04 PM	Main Vac valve closed
8/26/2011	2:46:04 PM	Bypass valve closed
8/26/2011	2:46:04 PM	Bubbler valve closed
8/26/2011	2:46:04 PM	Helium MFC set to  0.000000
8/26/2011	2:46:04 PM	H2 MFC set to  0.000000
8/26/2011	2:46:04 PM	BCl3 MFC set to  0.000000
8/26/2011	2:46:04 PM	PHl3 MFC set to  0.000000
8/26/2011	2:46:04 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:46:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:46:05 PM	Tube furnace set to 0
8/26/2011	2:46:06 PM	Run finished at 2:46 PM
8/26/2011	2:55:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	2:55:21 PM	Recipe started at 2:55 PM
8/26/2011	2:55:21 PM	Helium valve closed
8/26/2011	2:55:21 PM	H2 valve closed
8/26/2011	2:55:21 PM	BCl3 valve closed
8/26/2011	2:55:21 PM	PH3 valve closed
8/26/2011	2:55:21 PM	SiCl4 pre valve closed
8/26/2011	2:55:21 PM	SiCl4 post valve closed
8/26/2011	2:55:21 PM	Main Vac valve closed
8/26/2011	2:55:21 PM	Bubbler valve closed
8/26/2011	2:55:21 PM	Bypass valve opened
8/26/2011	2:55:21 PM	Helium MFC set to  0.000000
8/26/2011	2:55:21 PM	H2 MFC set to  0.000000
8/26/2011	2:55:21 PM	BCl3 MFC set to  0.000000
8/26/2011	2:55:21 PM	PHl3 MFC set to  0.000000
8/26/2011	2:55:21 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:55:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:55:21 PM	Tube furnace set to 0
8/26/2011	2:56:25 PM	Helium valve closed
8/26/2011	2:56:25 PM	H2 valve closed
8/26/2011	2:56:25 PM	BCl3 valve closed
8/26/2011	2:56:25 PM	PH3 valve closed
8/26/2011	2:56:25 PM	SiCl4 pre valve closed
8/26/2011	2:56:25 PM	SiCl4 post valve closed
8/26/2011	2:56:25 PM	Main Vac valve closed
8/26/2011	2:56:25 PM	Bubbler valve closed
8/26/2011	2:56:25 PM	Bypass valve opened
8/26/2011	2:56:25 PM	Helium MFC set to  0.000000
8/26/2011	2:56:25 PM	H2 MFC set to  0.000000
8/26/2011	2:56:25 PM	BCl3 MFC set to  0.000000
8/26/2011	2:56:25 PM	PHl3 MFC set to  0.000000
8/26/2011	2:56:25 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:56:25 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:56:25 PM	Tube furnace set to 0
8/26/2011	2:57:25 PM	Helium valve closed
8/26/2011	2:57:25 PM	H2 valve closed
8/26/2011	2:57:25 PM	BCl3 valve closed
8/26/2011	2:57:25 PM	PH3 valve closed
8/26/2011	2:57:25 PM	SiCl4 pre valve closed
8/26/2011	2:57:25 PM	SiCl4 post valve closed
8/26/2011	2:57:25 PM	Bypass valve closed
8/26/2011	2:57:25 PM	Bubbler valve closed
8/26/2011	2:57:25 PM	Main Vac valve opened
8/26/2011	2:57:25 PM	Helium MFC set to  0.000000
8/26/2011	2:57:25 PM	H2 MFC set to  0.000000
8/26/2011	2:57:25 PM	BCl3 MFC set to  0.000000
8/26/2011	2:57:25 PM	PHl3 MFC set to  0.000000
8/26/2011	2:57:25 PM	SiCl4 MFC set to  0.000000
8/26/2011	2:57:25 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	2:57:25 PM	Tube furnace set to 0
8/26/2011	2:57:26 PM	Run finished at 2:57 PM
8/26/2011	2:57:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	3:35:38 PM	Recipe started at 3:35 PM
8/26/2011	3:35:38 PM	Helium valve closed
8/26/2011	3:35:38 PM	H2 valve closed
8/26/2011	3:35:38 PM	BCl3 valve closed
8/26/2011	3:35:38 PM	PH3 valve closed
8/26/2011	3:35:38 PM	SiCl4 pre valve closed
8/26/2011	3:35:38 PM	SiCl4 post valve closed
8/26/2011	3:35:38 PM	Main Vac valve closed
8/26/2011	3:35:38 PM	Bypass valve closed
8/26/2011	3:35:38 PM	Bubbler valve closed
8/26/2011	3:35:38 PM	Helium MFC set to  0.000000
8/26/2011	3:35:38 PM	H2 MFC set to  0.000000
8/26/2011	3:35:38 PM	BCl3 MFC set to  0.000000
8/26/2011	3:35:38 PM	PHl3 MFC set to  0.000000
8/26/2011	3:35:38 PM	SiCl4 MFC set to  0.000000
8/26/2011	3:35:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:35:38 PM	Tube furnace set to 0
8/26/2011	3:35:41 PM	Helium valve closed
8/26/2011	3:35:41 PM	BCl3 valve closed
8/26/2011	3:35:41 PM	PH3 valve closed
8/26/2011	3:35:41 PM	SiCl4 pre valve closed
8/26/2011	3:35:41 PM	SiCl4 post valve closed
8/26/2011	3:35:41 PM	Main Vac valve closed
8/26/2011	3:35:41 PM	Bypass valve closed
8/26/2011	3:35:41 PM	Bubbler valve closed
8/26/2011	3:35:41 PM	H2 valve opened
8/26/2011	3:35:41 PM	Helium MFC set to  0.000000
8/26/2011	3:35:41 PM	H2 MFC set to  500.000000
8/26/2011	3:35:41 PM	BCl3 MFC set to  0.000000
8/26/2011	3:35:41 PM	PHl3 MFC set to  0.000000
8/26/2011	3:35:41 PM	SiCl4 MFC set to  0.000000
8/26/2011	3:35:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:35:41 PM	Tube furnace set to 0
8/26/2011	3:36:44 PM	Helium valve closed
8/26/2011	3:36:44 PM	BCl3 valve closed
8/26/2011	3:36:44 PM	PH3 valve closed
8/26/2011	3:36:44 PM	SiCl4 pre valve closed
8/26/2011	3:36:44 PM	SiCl4 post valve closed
8/26/2011	3:36:44 PM	Main Vac valve closed
8/26/2011	3:36:44 PM	Bypass valve closed
8/26/2011	3:36:44 PM	H2 valve opened
8/26/2011	3:36:44 PM	Bubbler valve opened
8/26/2011	3:36:44 PM	Helium MFC set to  0.000000
8/26/2011	3:36:44 PM	H2 MFC set to  500.000000
8/26/2011	3:36:44 PM	BCl3 MFC set to  0.000000
8/26/2011	3:36:44 PM	PHl3 MFC set to  0.000000
8/26/2011	3:36:44 PM	SiCl4 MFC set to  0.000000
8/26/2011	3:36:44 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:36:44 PM	Tube furnace set to 0
8/26/2011	3:36:45 PM	Helium valve closed
8/26/2011	3:36:45 PM	BCl3 valve closed
8/26/2011	3:36:45 PM	PH3 valve closed
8/26/2011	3:36:45 PM	SiCl4 pre valve closed
8/26/2011	3:36:45 PM	SiCl4 post valve closed
8/26/2011	3:36:45 PM	Main Vac valve closed
8/26/2011	3:36:45 PM	Bypass valve closed
8/26/2011	3:36:45 PM	H2 valve opened
8/26/2011	3:36:45 PM	Bubbler valve opened
8/26/2011	3:36:45 PM	Helium MFC set to  0.000000
8/26/2011	3:36:45 PM	H2 MFC set to  500.000000
8/26/2011	3:36:45 PM	BCl3 MFC set to  0.000000
8/26/2011	3:36:45 PM	PHl3 MFC set to  0.000000
8/26/2011	3:36:45 PM	SiCl4 MFC set to  0.000000
8/26/2011	3:36:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:36:45 PM	Tube furnace set to 1000
8/26/2011	3:56:45 PM	Helium valve closed
8/26/2011	3:56:45 PM	PH3 valve closed
8/26/2011	3:56:45 PM	SiCl4 post valve closed
8/26/2011	3:56:45 PM	Main Vac valve closed
8/26/2011	3:56:45 PM	Bypass valve closed
8/26/2011	3:56:45 PM	H2 valve opened
8/26/2011	3:56:45 PM	BCl3 valve opened
8/26/2011	3:56:45 PM	SiCl4 pre valve opened
8/26/2011	3:56:45 PM	Bubbler valve opened
8/26/2011	3:56:45 PM	Helium MFC set to  0.000000
8/26/2011	3:56:45 PM	H2 MFC set to  500.000000
8/26/2011	3:56:45 PM	BCl3 MFC set to  2.000000
8/26/2011	3:56:45 PM	PHl3 MFC set to  0.000000
8/26/2011	3:56:45 PM	SiCl4 MFC set to  50.000000
8/26/2011	3:56:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:56:45 PM	Tube furnace set to 1000
8/26/2011	3:56:47 PM	Helium valve closed
8/26/2011	3:56:47 PM	PH3 valve closed
8/26/2011	3:56:47 PM	Main Vac valve closed
8/26/2011	3:56:47 PM	Bypass valve closed
8/26/2011	3:56:47 PM	H2 valve opened
8/26/2011	3:56:47 PM	BCl3 valve opened
8/26/2011	3:56:47 PM	SiCl4 pre valve opened
8/26/2011	3:56:47 PM	SiCl4 post valve opened
8/26/2011	3:56:47 PM	Bubbler valve opened
8/26/2011	3:56:47 PM	Helium MFC set to  0.000000
8/26/2011	3:56:47 PM	H2 MFC set to  500.000000
8/26/2011	3:56:47 PM	BCl3 MFC set to  2.000000
8/26/2011	3:56:47 PM	PHl3 MFC set to  0.000000
8/26/2011	3:56:47 PM	SiCl4 MFC set to  50.000000
8/26/2011	3:56:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	3:56:47 PM	Tube furnace set to 1000
8/26/2011	4:11:47 PM	Helium valve closed
8/26/2011	4:11:47 PM	BCl3 valve closed
8/26/2011	4:11:47 PM	PH3 valve closed
8/26/2011	4:11:47 PM	SiCl4 pre valve closed
8/26/2011	4:11:47 PM	SiCl4 post valve closed
8/26/2011	4:11:47 PM	Main Vac valve closed
8/26/2011	4:11:47 PM	Bypass valve closed
8/26/2011	4:11:47 PM	H2 valve opened
8/26/2011	4:11:47 PM	Bubbler valve opened
8/26/2011	4:11:47 PM	Helium MFC set to  0.000000
8/26/2011	4:11:47 PM	H2 MFC set to  500.000000
8/26/2011	4:11:47 PM	BCl3 MFC set to  0.000000
8/26/2011	4:11:47 PM	PHl3 MFC set to  0.000000
8/26/2011	4:11:47 PM	SiCl4 MFC set to  0.000000
8/26/2011	4:11:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	4:11:47 PM	Tube furnace set to 950
8/26/2011	4:16:47 PM	Helium valve closed
8/26/2011	4:16:47 PM	BCl3 valve closed
8/26/2011	4:16:47 PM	PH3 valve closed
8/26/2011	4:16:47 PM	SiCl4 pre valve closed
8/26/2011	4:16:47 PM	SiCl4 post valve closed
8/26/2011	4:16:47 PM	Main Vac valve closed
8/26/2011	4:16:47 PM	Bypass valve closed
8/26/2011	4:16:47 PM	H2 valve opened
8/26/2011	4:16:47 PM	Bubbler valve opened
8/26/2011	4:16:47 PM	Helium MFC set to  0.000000
8/26/2011	4:16:47 PM	H2 MFC set to  500.000000
8/26/2011	4:16:47 PM	BCl3 MFC set to  0.000000
8/26/2011	4:16:47 PM	PHl3 MFC set to  0.000000
8/26/2011	4:16:47 PM	SiCl4 MFC set to  0.000000
8/26/2011	4:16:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	4:16:48 PM	Tube furnace set to 850
8/26/2011	4:21:48 PM	H2 valve closed
8/26/2011	4:21:48 PM	BCl3 valve closed
8/26/2011	4:21:48 PM	PH3 valve closed
8/26/2011	4:21:48 PM	SiCl4 pre valve closed
8/26/2011	4:21:48 PM	SiCl4 post valve closed
8/26/2011	4:21:48 PM	Main Vac valve closed
8/26/2011	4:21:48 PM	Bypass valve closed
8/26/2011	4:21:48 PM	Helium valve opened
8/26/2011	4:21:48 PM	Bubbler valve opened
8/26/2011	4:21:48 PM	Helium MFC set to  500.000000
8/26/2011	4:21:48 PM	H2 MFC set to  0.000000
8/26/2011	4:21:48 PM	BCl3 MFC set to  0.000000
8/26/2011	4:21:48 PM	PHl3 MFC set to  0.000000
8/26/2011	4:21:48 PM	SiCl4 MFC set to  0.000000
8/26/2011	4:21:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	4:21:48 PM	Tube furnace set to 0
8/26/2011	5:01:48 PM	Helium valve closed
8/26/2011	5:01:48 PM	H2 valve closed
8/26/2011	5:01:48 PM	BCl3 valve closed
8/26/2011	5:01:48 PM	PH3 valve closed
8/26/2011	5:01:48 PM	SiCl4 pre valve closed
8/26/2011	5:01:48 PM	SiCl4 post valve closed
8/26/2011	5:01:48 PM	Main Vac valve closed
8/26/2011	5:01:48 PM	Bypass valve closed
8/26/2011	5:01:48 PM	Bubbler valve closed
8/26/2011	5:01:48 PM	Helium MFC set to  0.000000
8/26/2011	5:01:48 PM	H2 MFC set to  0.000000
8/26/2011	5:01:48 PM	BCl3 MFC set to  0.000000
8/26/2011	5:01:48 PM	PHl3 MFC set to  0.000000
8/26/2011	5:01:48 PM	SiCl4 MFC set to  0.000000
8/26/2011	5:01:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	5:01:48 PM	Tube furnace set to 0
8/26/2011	5:01:49 PM	Run finished at 5:01 PM
8/26/2011	5:22:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	5:22:56 PM	Recipe started at 5:22 PM
8/26/2011	5:22:56 PM	Helium valve closed
8/26/2011	5:22:56 PM	H2 valve closed
8/26/2011	5:22:56 PM	BCl3 valve closed
8/26/2011	5:22:56 PM	PH3 valve closed
8/26/2011	5:22:56 PM	SiCl4 pre valve closed
8/26/2011	5:22:56 PM	SiCl4 post valve closed
8/26/2011	5:22:56 PM	Main Vac valve closed
8/26/2011	5:22:56 PM	Bubbler valve closed
8/26/2011	5:22:56 PM	Bypass valve opened
8/26/2011	5:22:56 PM	Helium MFC set to  0.000000
8/26/2011	5:22:56 PM	H2 MFC set to  0.000000
8/26/2011	5:22:56 PM	BCl3 MFC set to  0.000000
8/26/2011	5:22:56 PM	PHl3 MFC set to  0.000000
8/26/2011	5:22:56 PM	SiCl4 MFC set to  0.000000
8/26/2011	5:22:56 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	5:22:56 PM	Tube furnace set to 0
8/26/2011	5:24:02 PM	Helium valve closed
8/26/2011	5:24:02 PM	H2 valve closed
8/26/2011	5:24:02 PM	BCl3 valve closed
8/26/2011	5:24:02 PM	PH3 valve closed
8/26/2011	5:24:02 PM	SiCl4 pre valve closed
8/26/2011	5:24:02 PM	SiCl4 post valve closed
8/26/2011	5:24:02 PM	Main Vac valve closed
8/26/2011	5:24:02 PM	Bubbler valve closed
8/26/2011	5:24:02 PM	Bypass valve opened
8/26/2011	5:24:02 PM	Helium MFC set to  0.000000
8/26/2011	5:24:02 PM	H2 MFC set to  0.000000
8/26/2011	5:24:02 PM	BCl3 MFC set to  0.000000
8/26/2011	5:24:02 PM	PHl3 MFC set to  0.000000
8/26/2011	5:24:02 PM	SiCl4 MFC set to  0.000000
8/26/2011	5:24:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	5:24:02 PM	Tube furnace set to 0
8/26/2011	5:25:02 PM	Helium valve closed
8/26/2011	5:25:02 PM	H2 valve closed
8/26/2011	5:25:02 PM	BCl3 valve closed
8/26/2011	5:25:02 PM	PH3 valve closed
8/26/2011	5:25:02 PM	SiCl4 pre valve closed
8/26/2011	5:25:02 PM	SiCl4 post valve closed
8/26/2011	5:25:02 PM	Bypass valve closed
8/26/2011	5:25:02 PM	Bubbler valve closed
8/26/2011	5:25:02 PM	Main Vac valve opened
8/26/2011	5:25:02 PM	Helium MFC set to  0.000000
8/26/2011	5:25:02 PM	H2 MFC set to  0.000000
8/26/2011	5:25:02 PM	BCl3 MFC set to  0.000000
8/26/2011	5:25:02 PM	PHl3 MFC set to  0.000000
8/26/2011	5:25:02 PM	SiCl4 MFC set to  0.000000
8/26/2011	5:25:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	5:25:02 PM	Tube furnace set to 0
8/26/2011	5:25:03 PM	Run finished at 5:25 PM
8/26/2011	5:25:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	6:00:28 PM	Recipe started at 6:00 PM
8/26/2011	6:00:28 PM	Helium valve closed
8/26/2011	6:00:28 PM	H2 valve closed
8/26/2011	6:00:28 PM	BCl3 valve closed
8/26/2011	6:00:28 PM	PH3 valve closed
8/26/2011	6:00:28 PM	SiCl4 pre valve closed
8/26/2011	6:00:28 PM	SiCl4 post valve closed
8/26/2011	6:00:28 PM	Main Vac valve closed
8/26/2011	6:00:28 PM	Bypass valve closed
8/26/2011	6:00:28 PM	Bubbler valve closed
8/26/2011	6:00:28 PM	Helium MFC set to  0.000000
8/26/2011	6:00:28 PM	H2 MFC set to  0.000000
8/26/2011	6:00:28 PM	BCl3 MFC set to  0.000000
8/26/2011	6:00:28 PM	PHl3 MFC set to  0.000000
8/26/2011	6:00:28 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:00:28 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:00:28 PM	Tube furnace set to 0
8/26/2011	6:00:31 PM	Helium valve closed
8/26/2011	6:00:31 PM	BCl3 valve closed
8/26/2011	6:00:31 PM	PH3 valve closed
8/26/2011	6:00:31 PM	SiCl4 pre valve closed
8/26/2011	6:00:31 PM	SiCl4 post valve closed
8/26/2011	6:00:31 PM	Main Vac valve closed
8/26/2011	6:00:31 PM	Bypass valve closed
8/26/2011	6:00:31 PM	Bubbler valve closed
8/26/2011	6:00:31 PM	H2 valve opened
8/26/2011	6:00:31 PM	Helium MFC set to  0.000000
8/26/2011	6:00:31 PM	H2 MFC set to  500.000000
8/26/2011	6:00:31 PM	BCl3 MFC set to  0.000000
8/26/2011	6:00:31 PM	PHl3 MFC set to  0.000000
8/26/2011	6:00:31 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:00:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:00:31 PM	Tube furnace set to 0
8/26/2011	6:01:34 PM	Helium valve closed
8/26/2011	6:01:34 PM	BCl3 valve closed
8/26/2011	6:01:34 PM	PH3 valve closed
8/26/2011	6:01:34 PM	SiCl4 pre valve closed
8/26/2011	6:01:34 PM	SiCl4 post valve closed
8/26/2011	6:01:34 PM	Main Vac valve closed
8/26/2011	6:01:34 PM	Bypass valve closed
8/26/2011	6:01:34 PM	H2 valve opened
8/26/2011	6:01:34 PM	Bubbler valve opened
8/26/2011	6:01:34 PM	Helium MFC set to  0.000000
8/26/2011	6:01:34 PM	H2 MFC set to  500.000000
8/26/2011	6:01:34 PM	BCl3 MFC set to  0.000000
8/26/2011	6:01:34 PM	PHl3 MFC set to  0.000000
8/26/2011	6:01:34 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:01:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:01:34 PM	Tube furnace set to 0
8/26/2011	6:01:35 PM	Helium valve closed
8/26/2011	6:01:35 PM	BCl3 valve closed
8/26/2011	6:01:35 PM	PH3 valve closed
8/26/2011	6:01:35 PM	SiCl4 pre valve closed
8/26/2011	6:01:35 PM	SiCl4 post valve closed
8/26/2011	6:01:35 PM	Main Vac valve closed
8/26/2011	6:01:35 PM	Bypass valve closed
8/26/2011	6:01:35 PM	H2 valve opened
8/26/2011	6:01:35 PM	Bubbler valve opened
8/26/2011	6:01:35 PM	Helium MFC set to  0.000000
8/26/2011	6:01:35 PM	H2 MFC set to  500.000000
8/26/2011	6:01:35 PM	BCl3 MFC set to  0.000000
8/26/2011	6:01:35 PM	PHl3 MFC set to  0.000000
8/26/2011	6:01:35 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:01:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:01:36 PM	Tube furnace set to 1000
8/26/2011	6:21:36 PM	Helium valve closed
8/26/2011	6:21:36 PM	PH3 valve closed
8/26/2011	6:21:36 PM	SiCl4 post valve closed
8/26/2011	6:21:36 PM	Main Vac valve closed
8/26/2011	6:21:36 PM	Bypass valve closed
8/26/2011	6:21:36 PM	H2 valve opened
8/26/2011	6:21:36 PM	BCl3 valve opened
8/26/2011	6:21:36 PM	SiCl4 pre valve opened
8/26/2011	6:21:36 PM	Bubbler valve opened
8/26/2011	6:21:36 PM	Helium MFC set to  0.000000
8/26/2011	6:21:36 PM	H2 MFC set to  500.000000
8/26/2011	6:21:36 PM	BCl3 MFC set to  2.000000
8/26/2011	6:21:36 PM	PHl3 MFC set to  0.000000
8/26/2011	6:21:36 PM	SiCl4 MFC set to  50.000000
8/26/2011	6:21:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:21:36 PM	Tube furnace set to 1000
8/26/2011	6:21:38 PM	Helium valve closed
8/26/2011	6:21:38 PM	PH3 valve closed
8/26/2011	6:21:38 PM	Main Vac valve closed
8/26/2011	6:21:38 PM	Bypass valve closed
8/26/2011	6:21:38 PM	H2 valve opened
8/26/2011	6:21:38 PM	BCl3 valve opened
8/26/2011	6:21:38 PM	SiCl4 pre valve opened
8/26/2011	6:21:38 PM	SiCl4 post valve opened
8/26/2011	6:21:38 PM	Bubbler valve opened
8/26/2011	6:21:38 PM	Helium MFC set to  0.000000
8/26/2011	6:21:38 PM	H2 MFC set to  500.000000
8/26/2011	6:21:38 PM	BCl3 MFC set to  2.000000
8/26/2011	6:21:38 PM	PHl3 MFC set to  0.000000
8/26/2011	6:21:38 PM	SiCl4 MFC set to  50.000000
8/26/2011	6:21:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:21:38 PM	Tube furnace set to 1000
8/26/2011	6:36:38 PM	Helium valve closed
8/26/2011	6:36:38 PM	BCl3 valve closed
8/26/2011	6:36:38 PM	PH3 valve closed
8/26/2011	6:36:38 PM	SiCl4 pre valve closed
8/26/2011	6:36:38 PM	SiCl4 post valve closed
8/26/2011	6:36:38 PM	Main Vac valve closed
8/26/2011	6:36:38 PM	Bypass valve closed
8/26/2011	6:36:38 PM	H2 valve opened
8/26/2011	6:36:38 PM	Bubbler valve opened
8/26/2011	6:36:38 PM	Helium MFC set to  0.000000
8/26/2011	6:36:38 PM	H2 MFC set to  500.000000
8/26/2011	6:36:38 PM	BCl3 MFC set to  0.000000
8/26/2011	6:36:38 PM	PHl3 MFC set to  0.000000
8/26/2011	6:36:38 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:36:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:36:38 PM	Tube furnace set to 950
8/26/2011	6:41:38 PM	Helium valve closed
8/26/2011	6:41:38 PM	BCl3 valve closed
8/26/2011	6:41:38 PM	PH3 valve closed
8/26/2011	6:41:38 PM	SiCl4 pre valve closed
8/26/2011	6:41:38 PM	SiCl4 post valve closed
8/26/2011	6:41:38 PM	Main Vac valve closed
8/26/2011	6:41:38 PM	Bypass valve closed
8/26/2011	6:41:38 PM	H2 valve opened
8/26/2011	6:41:38 PM	Bubbler valve opened
8/26/2011	6:41:38 PM	Helium MFC set to  0.000000
8/26/2011	6:41:38 PM	H2 MFC set to  500.000000
8/26/2011	6:41:38 PM	BCl3 MFC set to  0.000000
8/26/2011	6:41:38 PM	PHl3 MFC set to  0.000000
8/26/2011	6:41:38 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:41:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:41:38 PM	Tube furnace set to 850
8/26/2011	6:46:38 PM	H2 valve closed
8/26/2011	6:46:38 PM	BCl3 valve closed
8/26/2011	6:46:38 PM	PH3 valve closed
8/26/2011	6:46:38 PM	SiCl4 pre valve closed
8/26/2011	6:46:38 PM	SiCl4 post valve closed
8/26/2011	6:46:38 PM	Main Vac valve closed
8/26/2011	6:46:38 PM	Bypass valve closed
8/26/2011	6:46:38 PM	Helium valve opened
8/26/2011	6:46:38 PM	Bubbler valve opened
8/26/2011	6:46:38 PM	Helium MFC set to  500.000000
8/26/2011	6:46:38 PM	H2 MFC set to  0.000000
8/26/2011	6:46:38 PM	BCl3 MFC set to  0.000000
8/26/2011	6:46:38 PM	PHl3 MFC set to  0.000000
8/26/2011	6:46:38 PM	SiCl4 MFC set to  0.000000
8/26/2011	6:46:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	6:46:38 PM	Tube furnace set to 0
8/26/2011	7:04:03 PM	Helium valve closed
8/26/2011	7:04:03 PM	H2 valve closed
8/26/2011	7:04:03 PM	BCl3 valve closed
8/26/2011	7:04:03 PM	PH3 valve closed
8/26/2011	7:04:03 PM	SiCl4 pre valve closed
8/26/2011	7:04:03 PM	SiCl4 post valve closed
8/26/2011	7:04:03 PM	Main Vac valve closed
8/26/2011	7:04:03 PM	Bubbler valve closed
8/26/2011	7:04:03 PM	Bypass valve closed
8/26/2011	7:04:03 PM	Helium MFC set to  0.000000
8/26/2011	7:04:03 PM	H2 MFC set to  0.000000
8/26/2011	7:04:03 PM	BCl3 MFC set to  0.000000
8/26/2011	7:04:03 PM	PHl3 MFC set to  0.000000
8/26/2011	7:04:03 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:04:03 PM	Bypass solenoid MFC set to  760.000000
8/26/2011	7:04:03 PM	Tube furnace set to 0
8/26/2011	7:04:03 PM	Baratron reads 737.235009 Torr and NaOH valve is open.  Emergency exit.
8/26/2011	7:04:15 PM	Run aborted at 7:04 PM
8/26/2011	7:04:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	7:04:20 PM	Recipe started at 7:04 PM
8/26/2011	7:04:20 PM	Helium valve closed
8/26/2011	7:04:20 PM	H2 valve closed
8/26/2011	7:04:20 PM	BCl3 valve closed
8/26/2011	7:04:20 PM	PH3 valve closed
8/26/2011	7:04:20 PM	SiCl4 pre valve closed
8/26/2011	7:04:20 PM	SiCl4 post valve closed
8/26/2011	7:04:20 PM	Main Vac valve closed
8/26/2011	7:04:20 PM	Bypass valve closed
8/26/2011	7:04:20 PM	Bubbler valve closed
8/26/2011	7:04:20 PM	Helium MFC set to  0.000000
8/26/2011	7:04:20 PM	H2 MFC set to  0.000000
8/26/2011	7:04:20 PM	BCl3 MFC set to  0.000000
8/26/2011	7:04:20 PM	PHl3 MFC set to  0.000000
8/26/2011	7:04:20 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:04:20 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:04:20 PM	Tube furnace set to 0
8/26/2011	7:04:23 PM	H2 valve closed
8/26/2011	7:04:23 PM	BCl3 valve closed
8/26/2011	7:04:23 PM	PH3 valve closed
8/26/2011	7:04:23 PM	SiCl4 pre valve closed
8/26/2011	7:04:23 PM	SiCl4 post valve closed
8/26/2011	7:04:23 PM	Main Vac valve closed
8/26/2011	7:04:23 PM	Bypass valve closed
8/26/2011	7:04:23 PM	Bubbler valve closed
8/26/2011	7:04:23 PM	Helium valve opened
8/26/2011	7:04:23 PM	Helium MFC set to  500.000000
8/26/2011	7:04:23 PM	H2 MFC set to  0.000000
8/26/2011	7:04:23 PM	BCl3 MFC set to  0.000000
8/26/2011	7:04:23 PM	PHl3 MFC set to  0.000000
8/26/2011	7:04:23 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:04:23 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:04:23 PM	Tube furnace set to 0
8/26/2011	7:04:24 PM	Helium valve closed
8/26/2011	7:04:24 PM	H2 valve closed
8/26/2011	7:04:24 PM	BCl3 valve closed
8/26/2011	7:04:24 PM	PH3 valve closed
8/26/2011	7:04:24 PM	SiCl4 pre valve closed
8/26/2011	7:04:24 PM	SiCl4 post valve closed
8/26/2011	7:04:24 PM	Main Vac valve closed
8/26/2011	7:04:24 PM	Bypass valve closed
8/26/2011	7:04:24 PM	Bubbler valve closed
8/26/2011	7:04:24 PM	Helium MFC set to  0.000000
8/26/2011	7:04:24 PM	H2 MFC set to  0.000000
8/26/2011	7:04:24 PM	BCl3 MFC set to  0.000000
8/26/2011	7:04:24 PM	PHl3 MFC set to  0.000000
8/26/2011	7:04:24 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:04:24 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:04:24 PM	Tube furnace set to 0
8/26/2011	7:04:24 PM	Run finished at 7:04 PM
8/26/2011	7:04:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2011	7:11:40 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	7:11:41 PM	Recipe started at 7:11 PM
8/26/2011	7:11:41 PM	Helium valve closed
8/26/2011	7:11:41 PM	H2 valve closed
8/26/2011	7:11:41 PM	BCl3 valve closed
8/26/2011	7:11:41 PM	PH3 valve closed
8/26/2011	7:11:41 PM	SiCl4 pre valve closed
8/26/2011	7:11:41 PM	SiCl4 post valve closed
8/26/2011	7:11:41 PM	Main Vac valve closed
8/26/2011	7:11:41 PM	Bubbler valve closed
8/26/2011	7:11:41 PM	Bypass valve opened
8/26/2011	7:11:41 PM	Helium MFC set to  0.000000
8/26/2011	7:11:41 PM	H2 MFC set to  0.000000
8/26/2011	7:11:41 PM	BCl3 MFC set to  0.000000
8/26/2011	7:11:41 PM	PHl3 MFC set to  0.000000
8/26/2011	7:11:41 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:11:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:11:41 PM	Tube furnace set to 0
8/26/2011	7:12:47 PM	Helium valve closed
8/26/2011	7:12:47 PM	H2 valve closed
8/26/2011	7:12:47 PM	BCl3 valve closed
8/26/2011	7:12:47 PM	PH3 valve closed
8/26/2011	7:12:47 PM	SiCl4 pre valve closed
8/26/2011	7:12:47 PM	SiCl4 post valve closed
8/26/2011	7:12:47 PM	Main Vac valve closed
8/26/2011	7:12:47 PM	Bubbler valve closed
8/26/2011	7:12:47 PM	Bypass valve opened
8/26/2011	7:12:47 PM	Helium MFC set to  0.000000
8/26/2011	7:12:47 PM	H2 MFC set to  0.000000
8/26/2011	7:12:47 PM	BCl3 MFC set to  0.000000
8/26/2011	7:12:47 PM	PHl3 MFC set to  0.000000
8/26/2011	7:12:47 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:12:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:12:47 PM	Tube furnace set to 0
8/26/2011	7:13:48 PM	Helium valve closed
8/26/2011	7:13:48 PM	H2 valve closed
8/26/2011	7:13:48 PM	BCl3 valve closed
8/26/2011	7:13:48 PM	PH3 valve closed
8/26/2011	7:13:48 PM	SiCl4 pre valve closed
8/26/2011	7:13:48 PM	SiCl4 post valve closed
8/26/2011	7:13:48 PM	Bypass valve closed
8/26/2011	7:13:48 PM	Bubbler valve closed
8/26/2011	7:13:48 PM	Main Vac valve opened
8/26/2011	7:13:48 PM	Helium MFC set to  0.000000
8/26/2011	7:13:48 PM	H2 MFC set to  0.000000
8/26/2011	7:13:48 PM	BCl3 MFC set to  0.000000
8/26/2011	7:13:48 PM	PHl3 MFC set to  0.000000
8/26/2011	7:13:48 PM	SiCl4 MFC set to  0.000000
8/26/2011	7:13:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	7:13:48 PM	Tube furnace set to 0
8/26/2011	7:13:49 PM	Run finished at 7:13 PM
8/26/2011	7:13:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	8:21:01 PM	Recipe started at 8:20 PM
8/26/2011	8:21:01 PM	Helium valve closed
8/26/2011	8:21:01 PM	H2 valve closed
8/26/2011	8:21:01 PM	BCl3 valve closed
8/26/2011	8:21:01 PM	PH3 valve closed
8/26/2011	8:21:01 PM	SiCl4 pre valve closed
8/26/2011	8:21:01 PM	SiCl4 post valve closed
8/26/2011	8:21:01 PM	Main Vac valve closed
8/26/2011	8:21:01 PM	Bypass valve closed
8/26/2011	8:21:01 PM	Bubbler valve closed
8/26/2011	8:21:01 PM	Helium MFC set to  0.000000
8/26/2011	8:21:01 PM	H2 MFC set to  0.000000
8/26/2011	8:21:01 PM	BCl3 MFC set to  0.000000
8/26/2011	8:21:01 PM	PHl3 MFC set to  0.000000
8/26/2011	8:21:01 PM	SiCl4 MFC set to  0.000000
8/26/2011	8:21:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:21:02 PM	Tube furnace set to 0
8/26/2011	8:21:05 PM	Helium valve closed
8/26/2011	8:21:05 PM	BCl3 valve closed
8/26/2011	8:21:05 PM	PH3 valve closed
8/26/2011	8:21:05 PM	SiCl4 pre valve closed
8/26/2011	8:21:05 PM	SiCl4 post valve closed
8/26/2011	8:21:05 PM	Main Vac valve closed
8/26/2011	8:21:05 PM	Bypass valve closed
8/26/2011	8:21:05 PM	Bubbler valve closed
8/26/2011	8:21:05 PM	H2 valve opened
8/26/2011	8:21:05 PM	Helium MFC set to  0.000000
8/26/2011	8:21:05 PM	H2 MFC set to  500.000000
8/26/2011	8:21:05 PM	BCl3 MFC set to  0.000000
8/26/2011	8:21:05 PM	PHl3 MFC set to  0.000000
8/26/2011	8:21:05 PM	SiCl4 MFC set to  0.000000
8/26/2011	8:21:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:21:05 PM	Tube furnace set to 0
8/26/2011	8:22:08 PM	Helium valve closed
8/26/2011	8:22:08 PM	BCl3 valve closed
8/26/2011	8:22:08 PM	PH3 valve closed
8/26/2011	8:22:08 PM	SiCl4 pre valve closed
8/26/2011	8:22:08 PM	SiCl4 post valve closed
8/26/2011	8:22:08 PM	Main Vac valve closed
8/26/2011	8:22:08 PM	Bypass valve closed
8/26/2011	8:22:08 PM	H2 valve opened
8/26/2011	8:22:08 PM	Bubbler valve opened
8/26/2011	8:22:08 PM	Helium MFC set to  0.000000
8/26/2011	8:22:08 PM	H2 MFC set to  500.000000
8/26/2011	8:22:08 PM	BCl3 MFC set to  0.000000
8/26/2011	8:22:08 PM	PHl3 MFC set to  0.000000
8/26/2011	8:22:08 PM	SiCl4 MFC set to  0.000000
8/26/2011	8:22:08 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:22:08 PM	Tube furnace set to 0
8/26/2011	8:22:09 PM	Helium valve closed
8/26/2011	8:22:09 PM	BCl3 valve closed
8/26/2011	8:22:09 PM	PH3 valve closed
8/26/2011	8:22:09 PM	SiCl4 pre valve closed
8/26/2011	8:22:09 PM	SiCl4 post valve closed
8/26/2011	8:22:09 PM	Main Vac valve closed
8/26/2011	8:22:09 PM	Bypass valve closed
8/26/2011	8:22:09 PM	H2 valve opened
8/26/2011	8:22:09 PM	Bubbler valve opened
8/26/2011	8:22:09 PM	Helium MFC set to  0.000000
8/26/2011	8:22:09 PM	H2 MFC set to  500.000000
8/26/2011	8:22:09 PM	BCl3 MFC set to  0.000000
8/26/2011	8:22:09 PM	PHl3 MFC set to  0.000000
8/26/2011	8:22:09 PM	SiCl4 MFC set to  0.000000
8/26/2011	8:22:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:22:09 PM	Tube furnace set to 1000
8/26/2011	8:42:09 PM	Helium valve closed
8/26/2011	8:42:09 PM	PH3 valve closed
8/26/2011	8:42:09 PM	SiCl4 post valve closed
8/26/2011	8:42:09 PM	Main Vac valve closed
8/26/2011	8:42:09 PM	Bypass valve closed
8/26/2011	8:42:09 PM	H2 valve opened
8/26/2011	8:42:09 PM	BCl3 valve opened
8/26/2011	8:42:09 PM	SiCl4 pre valve opened
8/26/2011	8:42:09 PM	Bubbler valve opened
8/26/2011	8:42:09 PM	Helium MFC set to  0.000000
8/26/2011	8:42:09 PM	H2 MFC set to  500.000000
8/26/2011	8:42:09 PM	BCl3 MFC set to  2.000000
8/26/2011	8:42:09 PM	PHl3 MFC set to  0.000000
8/26/2011	8:42:09 PM	SiCl4 MFC set to  50.000000
8/26/2011	8:42:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:42:09 PM	Tube furnace set to 1000
8/26/2011	8:42:11 PM	Helium valve closed
8/26/2011	8:42:11 PM	PH3 valve closed
8/26/2011	8:42:11 PM	Main Vac valve closed
8/26/2011	8:42:11 PM	Bypass valve closed
8/26/2011	8:42:11 PM	H2 valve opened
8/26/2011	8:42:11 PM	BCl3 valve opened
8/26/2011	8:42:11 PM	SiCl4 pre valve opened
8/26/2011	8:42:11 PM	SiCl4 post valve opened
8/26/2011	8:42:11 PM	Bubbler valve opened
8/26/2011	8:42:11 PM	Helium MFC set to  0.000000
8/26/2011	8:42:11 PM	H2 MFC set to  500.000000
8/26/2011	8:42:11 PM	BCl3 MFC set to  2.000000
8/26/2011	8:42:11 PM	PHl3 MFC set to  0.000000
8/26/2011	8:42:11 PM	SiCl4 MFC set to  50.000000
8/26/2011	8:42:11 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:42:11 PM	Tube furnace set to 1000
8/26/2011	8:57:11 PM	Helium valve closed
8/26/2011	8:57:11 PM	BCl3 valve closed
8/26/2011	8:57:11 PM	PH3 valve closed
8/26/2011	8:57:11 PM	SiCl4 pre valve closed
8/26/2011	8:57:11 PM	SiCl4 post valve closed
8/26/2011	8:57:11 PM	Main Vac valve closed
8/26/2011	8:57:11 PM	Bypass valve closed
8/26/2011	8:57:11 PM	H2 valve opened
8/26/2011	8:57:11 PM	Bubbler valve opened
8/26/2011	8:57:11 PM	Helium MFC set to  0.000000
8/26/2011	8:57:11 PM	H2 MFC set to  500.000000
8/26/2011	8:57:11 PM	BCl3 MFC set to  0.000000
8/26/2011	8:57:11 PM	PHl3 MFC set to  0.000000
8/26/2011	8:57:11 PM	SiCl4 MFC set to  0.000000
8/26/2011	8:57:11 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	8:57:12 PM	Tube furnace set to 950
8/26/2011	9:02:12 PM	Helium valve closed
8/26/2011	9:02:12 PM	BCl3 valve closed
8/26/2011	9:02:12 PM	PH3 valve closed
8/26/2011	9:02:12 PM	SiCl4 pre valve closed
8/26/2011	9:02:12 PM	SiCl4 post valve closed
8/26/2011	9:02:12 PM	Main Vac valve closed
8/26/2011	9:02:12 PM	Bypass valve closed
8/26/2011	9:02:12 PM	H2 valve opened
8/26/2011	9:02:12 PM	Bubbler valve opened
8/26/2011	9:02:12 PM	Helium MFC set to  0.000000
8/26/2011	9:02:12 PM	H2 MFC set to  500.000000
8/26/2011	9:02:12 PM	BCl3 MFC set to  0.000000
8/26/2011	9:02:12 PM	PHl3 MFC set to  0.000000
8/26/2011	9:02:12 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:02:12 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:02:12 PM	Tube furnace set to 850
8/26/2011	9:07:12 PM	H2 valve closed
8/26/2011	9:07:12 PM	BCl3 valve closed
8/26/2011	9:07:12 PM	PH3 valve closed
8/26/2011	9:07:12 PM	SiCl4 pre valve closed
8/26/2011	9:07:12 PM	SiCl4 post valve closed
8/26/2011	9:07:12 PM	Main Vac valve closed
8/26/2011	9:07:12 PM	Bypass valve closed
8/26/2011	9:07:12 PM	Helium valve opened
8/26/2011	9:07:12 PM	Bubbler valve opened
8/26/2011	9:07:12 PM	Helium MFC set to  500.000000
8/26/2011	9:07:12 PM	H2 MFC set to  0.000000
8/26/2011	9:07:12 PM	BCl3 MFC set to  0.000000
8/26/2011	9:07:12 PM	PHl3 MFC set to  0.000000
8/26/2011	9:07:12 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:07:12 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:07:12 PM	Tube furnace set to 0
8/26/2011	9:34:16 PM	Helium valve closed
8/26/2011	9:34:16 PM	H2 valve closed
8/26/2011	9:34:16 PM	BCl3 valve closed
8/26/2011	9:34:16 PM	PH3 valve closed
8/26/2011	9:34:16 PM	SiCl4 pre valve closed
8/26/2011	9:34:16 PM	SiCl4 post valve closed
8/26/2011	9:34:16 PM	Main Vac valve closed
8/26/2011	9:34:16 PM	Bypass valve closed
8/26/2011	9:34:16 PM	Bubbler valve closed
8/26/2011	9:34:16 PM	Helium MFC set to  0.000000
8/26/2011	9:34:16 PM	H2 MFC set to  0.000000
8/26/2011	9:34:16 PM	BCl3 MFC set to  0.000000
8/26/2011	9:34:16 PM	PHl3 MFC set to  0.000000
8/26/2011	9:34:17 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:34:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:34:17 PM	Tube furnace set to 0
8/26/2011	9:34:18 PM	Run finished at 9:34 PM
8/26/2011	9:38:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	9:38:45 PM	Recipe started at 9:38 PM
8/26/2011	9:38:45 PM	Helium valve closed
8/26/2011	9:38:45 PM	H2 valve closed
8/26/2011	9:38:45 PM	BCl3 valve closed
8/26/2011	9:38:45 PM	PH3 valve closed
8/26/2011	9:38:45 PM	SiCl4 pre valve closed
8/26/2011	9:38:45 PM	SiCl4 post valve closed
8/26/2011	9:38:45 PM	Main Vac valve closed
8/26/2011	9:38:45 PM	Bubbler valve closed
8/26/2011	9:38:45 PM	Bypass valve opened
8/26/2011	9:38:45 PM	Helium MFC set to  0.000000
8/26/2011	9:38:45 PM	H2 MFC set to  0.000000
8/26/2011	9:38:45 PM	BCl3 MFC set to  0.000000
8/26/2011	9:38:45 PM	PHl3 MFC set to  0.000000
8/26/2011	9:38:45 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:38:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:38:45 PM	Tube furnace set to 0
8/26/2011	9:39:49 PM	Helium valve closed
8/26/2011	9:39:49 PM	H2 valve closed
8/26/2011	9:39:49 PM	BCl3 valve closed
8/26/2011	9:39:49 PM	PH3 valve closed
8/26/2011	9:39:49 PM	SiCl4 pre valve closed
8/26/2011	9:39:49 PM	SiCl4 post valve closed
8/26/2011	9:39:49 PM	Main Vac valve closed
8/26/2011	9:39:49 PM	Bubbler valve closed
8/26/2011	9:39:49 PM	Bypass valve opened
8/26/2011	9:39:49 PM	Helium MFC set to  0.000000
8/26/2011	9:39:49 PM	H2 MFC set to  0.000000
8/26/2011	9:39:49 PM	BCl3 MFC set to  0.000000
8/26/2011	9:39:49 PM	PHl3 MFC set to  0.000000
8/26/2011	9:39:49 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:39:49 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:39:49 PM	Tube furnace set to 0
8/26/2011	9:40:49 PM	Helium valve closed
8/26/2011	9:40:49 PM	H2 valve closed
8/26/2011	9:40:49 PM	BCl3 valve closed
8/26/2011	9:40:49 PM	PH3 valve closed
8/26/2011	9:40:49 PM	SiCl4 pre valve closed
8/26/2011	9:40:49 PM	SiCl4 post valve closed
8/26/2011	9:40:49 PM	Bypass valve closed
8/26/2011	9:40:49 PM	Bubbler valve closed
8/26/2011	9:40:49 PM	Main Vac valve opened
8/26/2011	9:40:49 PM	Helium MFC set to  0.000000
8/26/2011	9:40:49 PM	H2 MFC set to  0.000000
8/26/2011	9:40:49 PM	BCl3 MFC set to  0.000000
8/26/2011	9:40:49 PM	PHl3 MFC set to  0.000000
8/26/2011	9:40:49 PM	SiCl4 MFC set to  0.000000
8/26/2011	9:40:49 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	9:40:49 PM	Tube furnace set to 0
8/26/2011	9:40:50 PM	Run finished at 9:40 PM
8/26/2011	9:40:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:25:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:25:24 PM	Recipe started at 10:25 PM
8/26/2011	10:25:24 PM	Helium valve closed
8/26/2011	10:25:24 PM	H2 valve closed
8/26/2011	10:25:24 PM	BCl3 valve closed
8/26/2011	10:25:24 PM	PH3 valve closed
8/26/2011	10:25:24 PM	SiCl4 pre valve closed
8/26/2011	10:25:24 PM	SiCl4 post valve closed
8/26/2011	10:25:24 PM	Main Vac valve closed
8/26/2011	10:25:24 PM	Bypass valve closed
8/26/2011	10:25:24 PM	Bubbler valve closed
8/26/2011	10:25:24 PM	Helium MFC set to  0.000000
8/26/2011	10:25:24 PM	H2 MFC set to  0.000000
8/26/2011	10:25:24 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:24 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:24 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:24 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:24 PM	Tube furnace set to 0
8/26/2011	10:25:24 PM	Run finished at 10:25 PM
8/26/2011	10:25:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/26/2011	10:25:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:25:36 PM	Recipe started at 10:25 PM
8/26/2011	10:25:36 PM	Helium valve closed
8/26/2011	10:25:36 PM	H2 valve closed
8/26/2011	10:25:36 PM	BCl3 valve closed
8/26/2011	10:25:36 PM	PH3 valve closed
8/26/2011	10:25:36 PM	SiCl4 pre valve closed
8/26/2011	10:25:36 PM	SiCl4 post valve closed
8/26/2011	10:25:36 PM	Main Vac valve closed
8/26/2011	10:25:36 PM	Bubbler valve closed
8/26/2011	10:25:36 PM	Bypass valve opened
8/26/2011	10:25:36 PM	Helium MFC set to  0.000000
8/26/2011	10:25:36 PM	H2 MFC set to  0.000000
8/26/2011	10:25:36 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:36 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:36 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:36 PM	Tube furnace set to 0
8/26/2011	10:25:36 PM	Helium valve closed
8/26/2011	10:25:36 PM	H2 valve closed
8/26/2011	10:25:36 PM	BCl3 valve closed
8/26/2011	10:25:36 PM	PH3 valve closed
8/26/2011	10:25:36 PM	SiCl4 pre valve closed
8/26/2011	10:25:36 PM	SiCl4 post valve closed
8/26/2011	10:25:36 PM	Main Vac valve closed
8/26/2011	10:25:36 PM	Bubbler valve closed
8/26/2011	10:25:36 PM	Bypass valve opened
8/26/2011	10:25:36 PM	Helium MFC set to  0.000000
8/26/2011	10:25:36 PM	H2 MFC set to  0.000000
8/26/2011	10:25:36 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:36 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:36 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:36 PM	Tube furnace set to 0
8/26/2011	10:25:37 PM	Helium valve closed
8/26/2011	10:25:37 PM	H2 valve closed
8/26/2011	10:25:37 PM	BCl3 valve closed
8/26/2011	10:25:37 PM	PH3 valve closed
8/26/2011	10:25:37 PM	SiCl4 pre valve closed
8/26/2011	10:25:37 PM	SiCl4 post valve closed
8/26/2011	10:25:37 PM	Bypass valve closed
8/26/2011	10:25:37 PM	Bubbler valve closed
8/26/2011	10:25:37 PM	Main Vac valve opened
8/26/2011	10:25:37 PM	Helium MFC set to  0.000000
8/26/2011	10:25:37 PM	H2 MFC set to  0.000000
8/26/2011	10:25:37 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:37 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:37 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:37 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:37 PM	Tube furnace set to 0
8/26/2011	10:25:38 PM	Run finished at 10:25 PM
8/26/2011	10:25:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	10:25:50 PM	Recipe started at 10:25 PM
8/26/2011	10:25:51 PM	Helium valve closed
8/26/2011	10:25:51 PM	H2 valve closed
8/26/2011	10:25:51 PM	BCl3 valve closed
8/26/2011	10:25:51 PM	PH3 valve closed
8/26/2011	10:25:51 PM	SiCl4 pre valve closed
8/26/2011	10:25:51 PM	SiCl4 post valve closed
8/26/2011	10:25:51 PM	Main Vac valve closed
8/26/2011	10:25:51 PM	Bypass valve closed
8/26/2011	10:25:51 PM	Bubbler valve closed
8/26/2011	10:25:51 PM	Helium MFC set to  0.000000
8/26/2011	10:25:51 PM	H2 MFC set to  0.000000
8/26/2011	10:25:51 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:51 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:51 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:51 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:51 PM	Tube furnace set to 0
8/26/2011	10:25:54 PM	Helium valve closed
8/26/2011	10:25:54 PM	BCl3 valve closed
8/26/2011	10:25:54 PM	PH3 valve closed
8/26/2011	10:25:54 PM	SiCl4 pre valve closed
8/26/2011	10:25:54 PM	SiCl4 post valve closed
8/26/2011	10:25:54 PM	Main Vac valve closed
8/26/2011	10:25:54 PM	Bypass valve closed
8/26/2011	10:25:54 PM	Bubbler valve closed
8/26/2011	10:25:54 PM	H2 valve opened
8/26/2011	10:25:54 PM	Helium MFC set to  0.000000
8/26/2011	10:25:54 PM	H2 MFC set to  500.000000
8/26/2011	10:25:54 PM	BCl3 MFC set to  0.000000
8/26/2011	10:25:54 PM	PHl3 MFC set to  0.000000
8/26/2011	10:25:54 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:25:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:25:54 PM	Tube furnace set to 0
8/26/2011	10:26:57 PM	Helium valve closed
8/26/2011	10:26:57 PM	BCl3 valve closed
8/26/2011	10:26:57 PM	PH3 valve closed
8/26/2011	10:26:57 PM	SiCl4 pre valve closed
8/26/2011	10:26:57 PM	SiCl4 post valve closed
8/26/2011	10:26:57 PM	Main Vac valve closed
8/26/2011	10:26:57 PM	Bypass valve closed
8/26/2011	10:26:57 PM	H2 valve opened
8/26/2011	10:26:57 PM	Bubbler valve opened
8/26/2011	10:26:57 PM	Helium MFC set to  0.000000
8/26/2011	10:26:57 PM	H2 MFC set to  500.000000
8/26/2011	10:26:57 PM	BCl3 MFC set to  0.000000
8/26/2011	10:26:57 PM	PHl3 MFC set to  0.000000
8/26/2011	10:26:57 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:26:57 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:26:57 PM	Tube furnace set to 0
8/26/2011	10:26:58 PM	Helium valve closed
8/26/2011	10:26:58 PM	BCl3 valve closed
8/26/2011	10:26:58 PM	PH3 valve closed
8/26/2011	10:26:58 PM	SiCl4 pre valve closed
8/26/2011	10:26:58 PM	SiCl4 post valve closed
8/26/2011	10:26:58 PM	Main Vac valve closed
8/26/2011	10:26:58 PM	Bypass valve closed
8/26/2011	10:26:58 PM	H2 valve opened
8/26/2011	10:26:58 PM	Bubbler valve opened
8/26/2011	10:26:58 PM	Helium MFC set to  0.000000
8/26/2011	10:26:58 PM	H2 MFC set to  500.000000
8/26/2011	10:26:58 PM	BCl3 MFC set to  0.000000
8/26/2011	10:26:58 PM	PHl3 MFC set to  0.000000
8/26/2011	10:26:58 PM	SiCl4 MFC set to  0.000000
8/26/2011	10:26:58 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:26:58 PM	Tube furnace set to 1000
8/26/2011	10:46:58 PM	Helium valve closed
8/26/2011	10:46:58 PM	PH3 valve closed
8/26/2011	10:46:58 PM	SiCl4 post valve closed
8/26/2011	10:46:58 PM	Main Vac valve closed
8/26/2011	10:46:58 PM	Bypass valve closed
8/26/2011	10:46:58 PM	H2 valve opened
8/26/2011	10:46:58 PM	BCl3 valve opened
8/26/2011	10:46:58 PM	SiCl4 pre valve opened
8/26/2011	10:46:58 PM	Bubbler valve opened
8/26/2011	10:46:58 PM	Helium MFC set to  0.000000
8/26/2011	10:46:58 PM	H2 MFC set to  500.000000
8/26/2011	10:46:58 PM	BCl3 MFC set to  2.000000
8/26/2011	10:46:58 PM	PHl3 MFC set to  0.000000
8/26/2011	10:46:58 PM	SiCl4 MFC set to  50.000000
8/26/2011	10:46:58 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:46:58 PM	Tube furnace set to 1000
8/26/2011	10:47:00 PM	Helium valve closed
8/26/2011	10:47:00 PM	PH3 valve closed
8/26/2011	10:47:00 PM	Main Vac valve closed
8/26/2011	10:47:00 PM	Bypass valve closed
8/26/2011	10:47:00 PM	H2 valve opened
8/26/2011	10:47:00 PM	BCl3 valve opened
8/26/2011	10:47:00 PM	SiCl4 pre valve opened
8/26/2011	10:47:00 PM	SiCl4 post valve opened
8/26/2011	10:47:00 PM	Bubbler valve opened
8/26/2011	10:47:00 PM	Helium MFC set to  0.000000
8/26/2011	10:47:00 PM	H2 MFC set to  500.000000
8/26/2011	10:47:00 PM	BCl3 MFC set to  2.000000
8/26/2011	10:47:00 PM	PHl3 MFC set to  0.000000
8/26/2011	10:47:00 PM	SiCl4 MFC set to  50.000000
8/26/2011	10:47:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	10:47:01 PM	Tube furnace set to 1000
8/26/2011	11:02:01 PM	Helium valve closed
8/26/2011	11:02:01 PM	BCl3 valve closed
8/26/2011	11:02:01 PM	PH3 valve closed
8/26/2011	11:02:01 PM	SiCl4 pre valve closed
8/26/2011	11:02:01 PM	SiCl4 post valve closed
8/26/2011	11:02:01 PM	Main Vac valve closed
8/26/2011	11:02:01 PM	Bypass valve closed
8/26/2011	11:02:01 PM	H2 valve opened
8/26/2011	11:02:01 PM	Bubbler valve opened
8/26/2011	11:02:01 PM	Helium MFC set to  0.000000
8/26/2011	11:02:01 PM	H2 MFC set to  500.000000
8/26/2011	11:02:01 PM	BCl3 MFC set to  0.000000
8/26/2011	11:02:01 PM	PHl3 MFC set to  0.000000
8/26/2011	11:02:01 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:02:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:02:01 PM	Tube furnace set to 950
8/26/2011	11:07:01 PM	Helium valve closed
8/26/2011	11:07:01 PM	BCl3 valve closed
8/26/2011	11:07:01 PM	PH3 valve closed
8/26/2011	11:07:01 PM	SiCl4 pre valve closed
8/26/2011	11:07:01 PM	SiCl4 post valve closed
8/26/2011	11:07:01 PM	Main Vac valve closed
8/26/2011	11:07:01 PM	Bypass valve closed
8/26/2011	11:07:01 PM	H2 valve opened
8/26/2011	11:07:01 PM	Bubbler valve opened
8/26/2011	11:07:01 PM	Helium MFC set to  0.000000
8/26/2011	11:07:01 PM	H2 MFC set to  500.000000
8/26/2011	11:07:01 PM	BCl3 MFC set to  0.000000
8/26/2011	11:07:01 PM	PHl3 MFC set to  0.000000
8/26/2011	11:07:01 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:07:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:07:01 PM	Tube furnace set to 850
8/26/2011	11:12:01 PM	H2 valve closed
8/26/2011	11:12:01 PM	BCl3 valve closed
8/26/2011	11:12:01 PM	PH3 valve closed
8/26/2011	11:12:01 PM	SiCl4 pre valve closed
8/26/2011	11:12:01 PM	SiCl4 post valve closed
8/26/2011	11:12:01 PM	Main Vac valve closed
8/26/2011	11:12:01 PM	Bypass valve closed
8/26/2011	11:12:01 PM	Helium valve opened
8/26/2011	11:12:01 PM	Bubbler valve opened
8/26/2011	11:12:01 PM	Helium MFC set to  500.000000
8/26/2011	11:12:01 PM	H2 MFC set to  0.000000
8/26/2011	11:12:01 PM	BCl3 MFC set to  0.000000
8/26/2011	11:12:01 PM	PHl3 MFC set to  0.000000
8/26/2011	11:12:01 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:12:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:12:01 PM	Tube furnace set to 0
8/26/2011	11:37:55 PM	Helium valve closed
8/26/2011	11:37:55 PM	H2 valve closed
8/26/2011	11:37:55 PM	BCl3 valve closed
8/26/2011	11:37:55 PM	PH3 valve closed
8/26/2011	11:37:55 PM	SiCl4 pre valve closed
8/26/2011	11:37:55 PM	SiCl4 post valve closed
8/26/2011	11:37:55 PM	Main Vac valve closed
8/26/2011	11:37:55 PM	Bubbler valve closed
8/26/2011	11:37:55 PM	Bypass valve closed
8/26/2011	11:37:55 PM	Helium MFC set to  0.000000
8/26/2011	11:37:55 PM	H2 MFC set to  0.000000
8/26/2011	11:37:55 PM	BCl3 MFC set to  0.000000
8/26/2011	11:37:55 PM	PHl3 MFC set to  0.000000
8/26/2011	11:37:55 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:37:55 PM	Bypass solenoid MFC set to  760.000000
8/26/2011	11:37:55 PM	Tube furnace set to 0
8/26/2011	11:37:55 PM	Baratron reads 741.318321 Torr and NaOH valve is open.  Emergency exit.
8/26/2011	11:38:02 PM	Run aborted at 11:38 PM
8/26/2011	11:42:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2011	11:42:02 PM	Recipe started at 11:42 PM
8/26/2011	11:42:02 PM	Helium valve closed
8/26/2011	11:42:02 PM	H2 valve closed
8/26/2011	11:42:02 PM	BCl3 valve closed
8/26/2011	11:42:02 PM	PH3 valve closed
8/26/2011	11:42:02 PM	SiCl4 pre valve closed
8/26/2011	11:42:02 PM	SiCl4 post valve closed
8/26/2011	11:42:02 PM	Main Vac valve closed
8/26/2011	11:42:02 PM	Bubbler valve closed
8/26/2011	11:42:02 PM	Bypass valve opened
8/26/2011	11:42:02 PM	Helium MFC set to  0.000000
8/26/2011	11:42:02 PM	H2 MFC set to  0.000000
8/26/2011	11:42:02 PM	BCl3 MFC set to  0.000000
8/26/2011	11:42:02 PM	PHl3 MFC set to  0.000000
8/26/2011	11:42:02 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:42:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:42:02 PM	Tube furnace set to 0
8/26/2011	11:43:05 PM	Helium valve closed
8/26/2011	11:43:05 PM	H2 valve closed
8/26/2011	11:43:05 PM	BCl3 valve closed
8/26/2011	11:43:05 PM	PH3 valve closed
8/26/2011	11:43:05 PM	SiCl4 pre valve closed
8/26/2011	11:43:05 PM	SiCl4 post valve closed
8/26/2011	11:43:05 PM	Main Vac valve closed
8/26/2011	11:43:05 PM	Bubbler valve closed
8/26/2011	11:43:05 PM	Bypass valve opened
8/26/2011	11:43:05 PM	Helium MFC set to  0.000000
8/26/2011	11:43:05 PM	H2 MFC set to  0.000000
8/26/2011	11:43:05 PM	BCl3 MFC set to  0.000000
8/26/2011	11:43:05 PM	PHl3 MFC set to  0.000000
8/26/2011	11:43:05 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:43:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:43:05 PM	Tube furnace set to 0
8/26/2011	11:44:05 PM	Helium valve closed
8/26/2011	11:44:05 PM	H2 valve closed
8/26/2011	11:44:05 PM	BCl3 valve closed
8/26/2011	11:44:05 PM	PH3 valve closed
8/26/2011	11:44:05 PM	SiCl4 pre valve closed
8/26/2011	11:44:05 PM	SiCl4 post valve closed
8/26/2011	11:44:05 PM	Bypass valve closed
8/26/2011	11:44:05 PM	Bubbler valve closed
8/26/2011	11:44:05 PM	Main Vac valve opened
8/26/2011	11:44:05 PM	Helium MFC set to  0.000000
8/26/2011	11:44:05 PM	H2 MFC set to  0.000000
8/26/2011	11:44:05 PM	BCl3 MFC set to  0.000000
8/26/2011	11:44:05 PM	PHl3 MFC set to  0.000000
8/26/2011	11:44:05 PM	SiCl4 MFC set to  0.000000
8/26/2011	11:44:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2011	11:44:05 PM	Tube furnace set to 0
8/26/2011	11:44:06 PM	Run finished at 11:44 PM
8/26/2011	11:44:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
